在石英纤维丝上对向靶材直流反应磁控溅射沉积氧化铝薄膜  

Alumina Thin Film Deposited on Quartz Fiber by Facing-Target DC Reactive Magnetron Sputtering

作　　者：王美涵[1] 高博文 陈昀 Wang Meihan;Gao Bowen;Chen Yun(School of Mechanical Engineering,Shenyang University,Shenyang 110044,China)

机构地区：[1]沈阳大学机械工程学院,辽宁沈阳110044

出　　处：《沈阳大学学报（自然科学版）》2018年第6期431-435,共5页Journal of Shenyang University：Natural Science

基　　金：国家自然科学基金青年基金资助项目(51302175);人社部留学人员科技活动择优资助项目(2015);辽宁省优秀人才支持计划资助项目(LJQ2014132)

摘　　要：采用对向靶材直流反应磁控溅射法,以金属铝为靶材,高纯氧为反应气体,在石英纤维丝上沉积了氧化铝薄膜,并对氧化铝薄膜的晶体结构、化学组成和表面形貌进行了研究.结果表明,室温沉积的氧化铝薄膜具有无定形结构,其组成为非化学计量比的氧化铝.场发射扫描电子显微镜(FE-SEM)显示在石英纤维丝上沉积的氧化铝薄膜致密且平整.沉积氧化铝薄膜的单根石英纤维丝的拉伸强度提高了1.85倍.Alumina thin film was deposited on quartz fiber by facing-target DC reactive magnetron sputtering with metal aluminum as the target and pure O2as the reactive gas.The crystal structure,chemical composition and surface morphology were characterized.The results show that the alumina thin film deposited at room temperature presents amorphous structure with non stoichiometry chemical composition.The surface morphology of the alumina thin film deposited on quartz fiber observed by FE-SEM is dense and flat.The tensile strength of single alumina thin film deposited on quartz fiber is1.85times higher than that of the single quartz fiber.

关 键 词：直流反应磁控溅射 对向靶材 氧化铝薄膜 石英纤维丝 

分 类 号：TN305.8[电子电信—物理电子学]