阶梯结构微梁传感器优化设计  

Optimization Design of Stepped Structure Micro-cantilever Sensor

作　　者：夏贝贝 揣荣岩[1] 张贺[1] XIA Bei-bei;CHUAI Rong-yan;ZHANG He(College of Information Science and Engineering,Shenyang University of Technology,Shenyang 110870,China)

机构地区：[1]沈阳工业大学信息科学与工程学院,辽宁沈阳110870

出　　处：《仪表技术与传感器》2018年第12期5-8,共4页Instrument Technique and Sensor

摘　　要：为了实现微悬臂梁传感器的自驱动自感知功能,设计了嵌套式阶梯结构微悬臂梁传感器。采用有限元分析的方法对其微梁的自由端弯曲位移和固有频率进行了仿真,研究了阶梯结构对微悬臂梁传感器性能的改善,确定了微悬臂梁传感器的阶梯结构参数。结果表明,经优化设计后的微梁传感器,微悬臂梁自由端弯曲位移可达566 nm,提高了2倍;固有频率可达385 k Hz,提高了1. 45倍。阶梯式微梁的成功设计为传感器的集成与小型化奠定了基础。In order to make the micro-cantilever sensor realize the function of self-drive and self-sensing,a nested ladder micro-cantilever sensor was designed.The free end bending displacement and natural frequency of the micro-beam were simulated by finite element analysis.The improvement of the performance of the micro-cantilever sensor by stepped structure was studied,and the ladder structural parameters of the micro-cantilever sensor were determined.The results show that the bending moment of free end of micro-cantilever can reach 566 nm,which is increased by 2 times.The natural frequency can reach 385 kHz,which is 1.45 times higher.The successful design of the stepped micro-beam lays the foundation for the integration and miniaturization of the sensor.

关 键 词：微悬臂梁 阶梯结构 多晶硅 压电驱动 弯曲位移 固有频率 

分 类 号：TB472[一般工业技术—工业设计]