射频功率发生器的功率检测装置研究  

Research on Power Detector of RF Power Generator

作　　者：崔晨 孙小孟[2] 林亭廷 赵丽莉[2] 武燕婷 张庆钊[2] 李勇滔[2] CUI Chen;SUN Xiaomeng;LIN Tingting;ZHAO Lili;WU Yanting;ZHANG Qingzhao;LI Yongtao(Beijing Tai Long Electronic Technology Co.,Ltd.,Beijing 100029,China;Institute of Microelectronics of the Chinese Academy of Sciences,Beijing 100029,China)

机构地区：[1]北京泰龙电子技术有限公司,北京100029 [2]中国科学院微电子研究所,北京100029

出　　处：《电子工业专用设备》2019年第2期4-7,共4页Equipment for Electronic Products Manufacturing

基　　金：国家科技重大专项(课题号:2014ZX02001004-002);国家重点研发计划(课题号:2016YFF0100201)的资助

摘　　要：射频功率发生器是半导体工艺设备的核心部件,功率检测装置的性能决定了射频功率发生器的功率输出特性。系统地研究了射频功率检测装置,通过选择适当的器件,设计出简单精确的射频功率检测电路;经试验分析,本射频功率检测装置的功率检测范围0～1 500 W,对应的检测输出电压范围0.2～4.65 V,该检测输出电压与实际输出功率基本呈线性关系。RF power generator is the core component of semiconductor process equipment,the characteristics of output power of the RF power generator depends on the performance of power detector. RF power detector has been studied systematically. By selecting appropriate devices,simple and precise RF power detection circuit has been designed. The experiments studies have indicated that the power detection range of the RF power detector is from 0 ~1 500 W,the corresponding detection output voltage range is from 0.2 ~4.65 V,and there is a almost linear relationship between the detection output voltage and the practical output power.

关 键 词：射频功率发生器 功率检测装置 检测输出电压 

分 类 号：TN622[电子电信—电路与系统]