GaSb基垂直腔面发射激光器P面反射镜优化设计  

Optimal design of P-side mirror for GaSb based vertical cavity surface emitting laser

作　　者：郝永芹 岳光礼 邹永刚 王作斌[2] 晏长岭 马晓辉 HAO Yong-Qin;YUE Guang-Li;ZOU Yong-Gang;WANG Zuo-Bin;YAN Chang-Ling;MA Xiao-Hui(National Key Lab oratory of High-Power Semiconductor Lasers,Changchun University of Science and Technology,Changchun130022,China;International Joint Research Centre for Nano Handling and Manufacturing,Changchun University of Science and Technology,Changchun 130022,China)

机构地区：[1]长春理工大学高功率半导体激光国家重点实验室,吉林长春130022 [2]长春理工大学科技部国家纳米操纵与制造国际联合研究中心,吉林长春130022

出　　处：《红外与毫米波学报》2019年第2期228-233,共6页Journal of Infrared and Millimeter Waves

基　　金：国家自然科学基金(11474038;61376045;11474036);吉林省科技发展计划项目(20180519018JH;20160101254JC);国家"111"计划(D17017)~~

摘　　要：针对当前2. 0μm GaSb基垂直腔面发射激光器发展中由于传统的P面分布布拉格反射镜(P-DBRs)带来的高电阻和严重光吸收这一瓶颈问题,采用严格耦合波方法仿真设计了含高对比度亚波长光栅(HCG)的P面反射镜.实验结果表明,这种制备工艺简单的反射镜在2. 0μm中心波长附近,TM波入射时反射率超过99. 5%的高反射带宽为278 nm,反射率99. 9%以上的高反射带宽达到148 nm,完全能够满足VCSEL对谐振腔镜的要求,且能有效避免因异质外延等造成反射镜衍射特性劣化等问题.The high resistance and severe optical absorption brought by the traditional P-side distributed Bragg reflectors(P-DBRs)have been the bottleneck of the development of 2.0μm GaSb based vertical cavity surface emitting lasers(VCSELs).For this reason,a P-side mirror with high contrast subwavelength grating(HCG)is designed and simulated by the rigorous coupled wave analysis method.The testing results showthe HCGmirror,easy to make,has 278 nm bandwidth with reflectivity more than 99.5%and 148 nm bandwidth with reflectivity greater than 99.9%around the central wavelength of 2.0μm for TMmode.Such a mirror can fully meet the requirements of VCSELs,and can effectively avoid the problem of diffraction characteristics deterioration caused by heteroepitaxy and so on.

关 键 词：垂直腔面发射激光器 锑化镓 分布布拉格反射镜 高对比度亚波长光栅 

分 类 号：O472[理学—半导体物理]