压电陶瓷驱动器迟滞建模方法研究  

Study of Hysteresis Modeling Method for Piezoelectric Driver

作　　者：王艳艳[1] 边焱 郭海[2] WANG Yanyan;BIAN Yan;GUO Hai(Tianjin Key Laboratory of Information Sensing and Intelligent Control,Tianjin University of Technology and Education,Tianjin 300222,China;National Ocean Technology Center,Tianjin 300112,China)

机构地区：[1]天津职业技术师范大学天津市信息传感与智能控制重点实验室,天津300222 [2]国家海洋技术中心,天津300112

出　　处：《传感技术学报》2019年第4期562-567,共6页Chinese Journal of Sensors and Actuators

基　　金：天津市自然科学基金青年项目(18JCQNJC05600);天津市科技计划项目(17KPXMSF00120);天津市教委科研计划项目(JWK1612)

摘　　要：压电陶瓷驱动器是原子力显微镜(AFM)的关键组件。AFM在生物、材料及半导体等领域应用广泛,而利用AFM获得高精确的测试结果依然面临诸多挑战。其中,压电陶瓷驱动器具有迟滞、非线性等特点,在大范围高频工作状态下,对定位精度的影响更显著,这严重限制了AFM的进一步应用。本文围绕大范围压电陶瓷驱动器的迟滞性展开研究,设计一种基于改进型多项式拟合算法的迟滞建模方法,使得拟合模型可随输入信号频率的变化而变化,充分提高压电陶瓷迟滞模型的准确性。实验表明,该方法可为压电陶瓷驱动器建立准确的迟滞模型,建模过程简单,通过设计基于该迟滞逆模型的前馈控制算法,可使驱动范围在100μm的压电陶瓷驱动器的线性度提高至1.5%。Piezoelectric driver is an important part of Atomic force microscopy(AFM). AFM is widely used in fields of biology,chemistry,materials and semiconductor. However,many challenges still exist in the application of AFM to achieve highly accurate measurement results. Due to the hysteresis and nonlinearity of PZT,its positioning accuracy is low at high frequency or large range,limiting the further application of AFM. The paper proposed an improved polynomial fitting method to improve the accuracy of the hysteresis model. The model could change its parameters as the signal frequency changes. Experiments prove that the method could build accurate model to describe the hysteresis of PZT with large range. The modeling process is easy. The nonlinearity of PZT(driving range 100 μm)could be improved to 1.5% by designing a feedforward controller based on the inverse model.

关 键 词：压电陶瓷驱动器 迟滞性 动态多项式拟合 逆模型 AFM 

分 类 号：TN384[电子电信—物理电子学]