光栅传感器正交信号自动实时补偿技术研究  

Research on Real-time Compensation Technology for Orthogonal Signal of Grating Sensor

作　　者：赵雨露 夏豪杰[1] 张瑞[1] Zhao Yulu;Xia Haojie;Zhang Rui(School of Instrument Science and Opto-Electronics Engineering,Hefei University of Technology,Hefei 230009,China)

机构地区：[1]合肥工业大学

出　　处：《工具技术》2019年第5期112-116,共5页Tool Engineering

基　　金：国家自然科学基金重大科研仪器研制项目(51427805)

摘　　要：为提高光栅尺的测量精度和分辨率,对光栅位移传感器输出信号的自动实时处理方法进行研究。分析了光栅尺输出信号中存在的误差因素,根据Heydemann误差补偿模型修正信号中的非正交误差、直流误差和不等幅误差,利用CORDIC算法对修正后的信号进行细分。处理过程在LabVIEW环境下进行,利用FPGA模块实现信号实时处理,并与XL-80干涉仪比对验证该处理可有效补偿信号中的各类误差,且测量相对误差不超过±2μm。In order to improve the measurement accuracy and resolution of the grating sensor,the real-time processing method of the output signal of the grating displacement sensor is researched.The error sources in the output signal of the grating sensor are analyzed.The Heydemann error compensation model is used to compensate the non-orthogonal error,DC error and unequal amplitude error in the signal and the CORDIC algorithm is used to subdivide the modified signal.The signal processing is performed with LabVIEW which can realize real-time processing of signals with FPGA module.Comparing with the result from Renishaw interferometer XL- 80,the processing method can effectively compensate various errors of the signal,and the relative error is less than ±2μm.

关 键 词：光栅尺 误差补偿 细分辨向 LABVIEW 

分 类 号：TG741.6[金属学及工艺—刀具与模具] TH741.6[机械工程—光学工程]