抛光液在兆声振动作用下的流动特性仿真  

Flow Characteristics Simulation of Slurry under Megasonic Vibration

作　　者：李小龙 何勍[1] 李亮[2] LI Xiao-long;HE Qing;LI Liang(College of Mechanical Engineering and Automation,Liaoning University of Technology,Jinzhou 121001,China;College of Science,Liaoning University of Technology,Jinzhou 121001,China)

机构地区：[1]辽宁工业大学机械工程与自动化学院,辽宁锦州121001 [2]辽宁工业大学理学院,辽宁锦州121001

出　　处：《辽宁工业大学学报（自然科学版）》2019年第3期173-176,共4页Journal of Liaoning University of Technology(Natural Science Edition)

基　　金：辽宁省科学技术计划项目(2015020159)

摘　　要：为研究兆声辅助化学机械抛光中振动对抛光液流体的影响。采用理论分析方法,研究兆声振动在抛光液中产生的声辐射压力,利用有限元分析,建立抛光过程中抛光垫单孔隙、抛光液层、声源等简化模型,研究兆声振动作用到抛光液中后抛光液的运动变化。结果表明兆声振动能够对抛光液产生声辐射压力,其值大小与声压、流体密度、声速有关。有限元仿真分析表明,兆声振动能够使抛光垫孔隙内抛光液的流速加快,促进孔隙内外的抛光液进行交换。使得闲置在抛光垫孔隙内的部分抛光液流出,而部分携带残屑的抛光液则会流入到孔隙内。To study the effect of vibration on slurry in megasonic vibration assisted chemical mechanical polishing, the acoustic radiation pressure produced by megasonic vibration in slurry was studied by theoretical analysis method. A simplified model of polishing pad with single hole,slurry layer and sound source was established by finite element analysis to study the motion of slurry after megasonic vibration was applied to slurry. When megasonic vibration acts on the slurry, it can generate sound radiation pressure on the slurry, which is related to sound pressure,fluid density and sound speed. Finite element simulation analysis shows that megasonic vibration can accelerate the flow rate of slurry in the hole of polishing pad, and promote the exchange of slurry inside and outside the pore. The megasonic vibration makes the part of slurry in the pore of polishing pad flow out, while the part of slurry with debris will flow into the pore.

关 键 词：兆声振动 抛光垫孔隙 抛光液 流动特性 有限元分析 

分 类 号：TB535[理学—物理]