一种线阵CCD融合光栅尺的高精度尺寸测量新方法研究  

Research on a new method of high precision dimension measurement based on linear CCD fused grating ruler

作　　者：同志学[1] 白金池 康智强[1,2,3] TONG Zhixue;BAI Jinchi;KANG Zhiqiang(Mechanism and Electron College, Xi'an University of Architecture and Technology, Xi'an 710055, China;College of Automation, Northwestern Polytechnical University, Xi'an 710055, China;Institute of Advanced Technology, Chinese Academy of Sciences, Guangdong 511458, China)

机构地区：[1]西安建筑科技大学机电工程学院,陕西西安710055 [2]西北工业大学自动化学院,陕西西安710072 [3]中国科学院先进技术研究所,广东广州511458

出　　处：《光学技术》2019年第3期275-281,共7页Optical Technique

基　　金：陕西省教育厅自然科学资助项目(17JK0445);长安大学道路施工技术与装备教育部重点实验室开放基金(310825161107);广东引进创新创业团队专项(2014ZT05G132);深圳市海外高层次人才资金(KQTD2015033117354154)

摘　　要：为了解决数字图像亚像素级高精度尺寸检测问题,采用了基于人工神经网络的线阵相机镜头畸变矫正方法,比传统的多项式拟合法矫正精度高且操作简便;提出了将光栅尺融入线阵相机扫描机构的新方法,利用高精度光栅尺测位移信号触发线阵CCD图像采集动作,精确获取线阵相机扫描目标的亚像素级图像。实验证明,新的测量技术可在对运动系统要求不高的情况下获取高精度图像,图像检测精度可以达到1μm。In order to solve the problem of high-precision dimension detection at sub-pixel level in digital images, a linear array camera lens distortion correction method based on artificial neural network is adopted, which is higher in accuracy and easier to operate than the traditional polynomial fitting method. A new method of integrating the grating ruler into the scanning mechanism of the linear array camera is proposed, which uses the displacement signal measured by the high-precision grating ruler to trigger the image acquisition action of the linear array CCD to accurately acquire the sub-pixel image of the scanning target of the linear array camera. Experiments show that the new measurement technology can obtain high-precision images with low requirements on the motion system, and the image detection accuracy can reach 1μm.

关 键 词：神经网络 畸变矫正 光栅尺 亚像素尺寸检测 

分 类 号：TH741[机械工程—光学工程]