基于COMSOL的气敏薄膜初始电阻模拟计算  

Simulated Calculation of Initial Resistance of Gas Sensing Thin Film Based on COMSOL

作　　者：张子立 殷晨波[2] ZHANG Zi-li;YIN Chen-bo(Jinling Institute of Technology, Nanjing 211169, China;Nanjing Technology University, Nanjing 211816, China)

机构地区：[1]金陵科技学院机电工程学院,江苏南京211169 [2]南京工业大学机械与动力工程学院,江苏南京211816

出　　处：《金陵科技学院学报》2019年第2期6-10,共5页Journal of Jinling Institute of Technology

基　　金：国家自然科学基金(51575255)

摘　　要：叉指电极可有效降低金属氧化物半导体气敏薄膜的测试电阻,有利于薄膜气敏性能的测量,已广泛用于薄膜型气体传感器上。而叉指电极的尺寸不仅会影响传感器表面的热量分布,也会对薄膜初始电阻造成影响。提出了解微分方程法计算叉指电极上气敏薄膜的初始电阻,推导了计算薄膜初始电阻的微分方程,采用COMSOL软件中的AC/DC模块,对特定尺寸叉指电极上的气敏薄膜在不同工作温度时初始电阻进行了仿真,并与实验进行了对比,证明了该方法的可行性。The interdigital electrode can effectively reduce the test resistance of metal oxide semiconductor gas sensing film, which is conducive to test the performance of the thin film gas sensing.It has been widely used in thin film type gas sensors.But the size of the interdigital electrode will not only affect the heat distribution on the surface of the sensor, but also affect the initial resistance of the film.In this paper, the method of solving differential equation for calculating the initial resistance of gas sensing thin film is presented.The differential equation for calculating the initial resistance of thin films is derived.The initial resistances of gas sensing thin film on the interdigital electrodes at different operation temperature are simulated by using AC/DC module of COMSOL software.Compared with the experiment, the method is proved to be feasible.

关 键 词：叉指电极 气敏薄膜 初始电阻 微分方程 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]