灵敏度和偏移补偿的MEMS压阻式加速度传感器  

A MEMS Piezoresistive Acceleratometer with Sensitivity and Offset Compensation

作　　者：侯倩萍[1] 常京 HOU Qian-ping;CHANG Jing(Sichuan Engineering Technical College, Deyang 618000,China;School of AutonuUion, Beijing Institute of Technology, Beijing 100081,China)

机构地区：[1]四川工程职业技术学院,四川德阳618000 [2]北京理工大学自动化学院,北京100081

出　　处：《火力与指挥控制》2019年第9期72-77,共6页Fire Control & Command Control

基　　金：北京市自然科学基金资助项目(1182615)

摘　　要：针对传感器中存在的灵敏度和偏移补偿问题,提出了一种新的MEMS压阻式加速度传感器设计,它由一个传感器和一个总的接口电路构成,可用0.18μm商用CMOS工艺实现设计。传感器结构由8个硼扩散结晶体压敏电阻连接起来构成一个惠斯通电桥来感知加速度;接口电路由一个主放大器和传感器灵敏度及温度偏移补偿电路构成;实验结果表明,传感器具有很高的在轴加速度灵敏度和灵敏度补偿效果,整个系统具有可达5 k Hz的可扩展的系统带宽,而且偏移估计误差减少到了±10μV以内。Aiming at the issue of sensitivity and offset compensation existing in sensors,a new design for MEMS piezoresistive accelerometer in this paper,which is composed of a sensor and a total interfacing circuit and is designed in 0.18 μm commercial CMOS process.The accelerometer structure consists of eight boron-diffused piezoresistors and is connected to form a Wheatstone bridge for sensing the acceleration. The interfacing circuit consists of a main amplifier and a circuit for sensor sensitivity and offset temperature compensation. The experimental results show that the sensor has a high on-axis acceleration sensitivity and sensitivity compensation effect and the whole system has a scalable system bandwith up to 5 kHz and the error in offset estimation is reduced to within less ±10 μV as well as.

关 键 词：MEMS 压阻式加速度传感器 补偿 灵敏度 动态范围 偏移估计误差 

分 类 号：P229.1[天文地球—大地测量学与测量工程]