光栅衬底液相外延技术  

Research on Liquid Phase Epitaxy Growth on Corrugated Substrates

作　　者：朱志文[1] 

机构地区：[1]重庆光电技术研究所,重庆永川632163

出　　处：《半导体光电》1992年第2期126-129,共4页Semiconductor Optoelectronics

摘　　要：光栅衬底液相外延是分布反馈激光器研制的关键技术之一。利用 Sn-In-p 和 GaAs 单晶作为光栅衬底表面的高温热保护盖片,有效地解决了光栅表面高温热损伤问题,在光栅表面重复地生长出了高质量的外延层,并以此为基础,研制出了DFB 激光器。Liquid phase epitaxy growth on corrugated substrates is one of the key technologies for the fabrication of distributed feedback(DFB)lasers.Using Sn- In-P and GaAs as the thermal protecting cover,the problem of the damage on the surface of the corrugated substrates at high temperature is overcomed and high quality LPE layers on corrugation surface are grown.DFB lasers are thus develo- ped on the basis of this technology.

关 键 词：相干光通信 半导体激光器 液相外延 

分 类 号：TN248.4[电子电信—物理电子学]