一种磁吸附式微小型惯性粘滑运动平台研究  

Research on a Magnetic Adsorption Micro-small Inertial Stick-slip Motion Platform

作　　者：刘彬 钟博文[1] 王振华[1] 孙立宁[1] LIU Bin;ZHONG Bowen;WANG Zhenhua;SUN Lining(College of Mechanical and Electrical Engineering,Soochow University,Suzhou 215000,China)

机构地区：[1]苏州大学机电工程学院

出　　处：《压电与声光》2019年第5期725-727,764,共4页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(51875378);江苏省自然科学基金资助项目(BK20181439);苏州科技发展基金资助项目(SYG201720)

摘　　要：在显微操作领域中,要求运动平台能在狭小空间中实现高精度的位姿调整,因此,该文提出了一款整体尺寸仅10 mm×10 mm×10 mm的惯性粘滑精密跨出度定位运动平台。该结构的设计采用将惯性部分与滑块部分集成为一体的设计方案,摩擦力使用磁铁来提供。对惯性粘滑运动平台中的柔性铰链进行尺寸优化,并使用有限元分析软件进行校核,验证理论分析的正确性。测试样机性能结果表明,水平方向最大运动速度为4.966 mm/s,竖直方向上运动速度可达2.1 mm/s,正、反向最大单步位移分别为2.984μm和2.349μm,步长重复性良好。实验证明,该样机具有体积小,运动速度快,步长重复性稳定等特点,适用于狭小空间内的高精度运动。In the field of micromanipulation,the motion platform is required to realize high-precision pose adjustment in a small space.Based on this,this paper proposes an inertial stick-slip precision spanning positioning motion platform with an overall size of only 10 mm×10 mm×10 mm.The design scheme that integrates the inertial portion with the slider portion is used,and the friction is provided by a magnet.The size optimization of the flexible hinge in the inertial stick-slip motion platform is carried out and checked by finite element analysis software to verify the correctness of theoretical analysis.The test result of the prototype shows that the maximum moving speed in the horizontal direction is 4.966 mm/s,the moving speed in the vertical direction is 2.1 mm/s,and the maximum single-step displacement in the forward and reverse directions is 2.984μm and 2.349μm,respectively.The repeatability of the step length is good.The experiment proves that the prototype has the characteristics of small volume,fast moving speed,stable step length and the like,and is suitable for high-precision motion in a narrow space.

关 键 词：压电陶瓷 惯性粘滑运动 小体积 纳米定位 柔性铰链 

分 类 号：TH703[机械工程—仪器科学与技术] TP242[机械工程—精密仪器及机械]