基于模糊自适应PID真空室温度控制的研究  

Research on Vacuum Chamber Temperature Control Based on Fuzzy Adaptive PID

作　　者：张申宇 马天兵[1] 罗松松 王程 ZHANG Shen-yu;MA Tian-bing;LUO Song-song;WANG Cheng(School of Mechanical Engineering,Anhui University of Science and Technology,Huainan Anhui 232001,China;Triumph Heavy Industry Co.,Ltd.,Huainan Anhui 232052,China;不详)

机构地区：[1]安徽理工大学机械工程学院,安徽淮南232001 [2]凯盛重工有限公司,安徽淮南232052 [3]中国建材国际工程有限公司,安徽蚌埠233018

出　　处：《组合机床与自动化加工技术》2019年第11期92-95,共4页Modular Machine Tool & Automatic Manufacturing Technique

基　　金：安徽省科技重大专项(16030901003)

摘　　要：为提高CIGS薄膜太阳能玻璃钼合金背电极制备过程中温度控制系统的响应速度和稳定性,创建了真空室的温度控制系统数学模型,并提出一种模糊自适应PID控制温度的方法。确定传递函数及参数并进行验证,模拟得出传统PID温度控制仿真曲线,进而设计一种模糊控制器,能够自适应调节P、I、D三个参数,最后给出模糊自适应PID控制温度的曲线,并与传统PID控制做出分析与比较。仿真结果表明,控制系统在130s时达到稳定状态,调节时间较短,超调量和稳态误差均为0,模糊自适应PID控制算法相比于传统PID控制效果有明显的提高。In order to improve the response speed and stability of the temperature control system during the preparation of CIGS thin film solar glass molybdenum alloy back electrode,the mathematical model of the temperature control system of the vacuum chamber was established,and a fuzzy self-adaptive PID temperature control method was proposed.The transfer function and parameters are determined and verified,the simulation results of the traditional PID temperature control simulation curve are obtained,and then a fuzzy controller is designed,which can adjust the parameters P,I and D.finally,the curve of the fuzzy adaptive PID control temperature is given,and the analysis and comparison with the traditional PID control are made.The simulation results show that the control system reaches steady state at 130s,the adjustment time is short,the overshoot and steady state error are both 0,and the fuzzy adaptive PID control algorithm has obvious improvement compared with the traditional PID control effect.

关 键 词：模糊控制 自适应 PID 温度控制 

分 类 号：TH16[机械工程—机械制造及自动化] TG506[金属学及工艺—金属切削加工及机床]