基于SID算法的MEMS陀螺仪测控系统设计  

Design of MEMS gyroscope measurement and control system based on SID algorithm

作　　者：王亚林 杨拥军[1] 任臣[1] WANG Yalin;YANG Yongjun;REN Chen(The 13th Research Institute,China Electronics Technology Group Corporation,Shijiazhuang 050051,China)

机构地区：[1]中国电子科技集团公司第十三研究所

出　　处：《传感器与微系统》2019年第12期100-102,106,共4页Transducer and Microsystem Technologies

摘　　要：传统的微机电系统(MEMS)微陀螺仪解调算法抗噪声能力差、硬件资源消耗多,提出了一种同步积分解调算法(SID),用于MEMS陀螺闭环测控电路中,实现了驱动/检测信号解调输出。三阶同步积分器构成解调器。仿真分析表明:SID具有更快的响应时间,更低的噪声水平,硬件资源消耗更少。基于SID算法,建立了MEMS陀螺数字闭环测控系统,驱动闭环中锁相环技术和自动增益控制技术实现陀螺恒幅恒频谐振,检测闭环中高阶带通ΣΔ环路滤波器提高了陀螺带宽和响应性能。仿真结果表明:陀螺驱动振幅为4.738μm,起振时间为0.12 s,检测带宽为200 Hz,信噪比达到了113.2 d B。Aiming at the problem that traditional demodulation algorithm of MEMS gyroscope has poor anti-noise ability and consumes much hardware resources,a synchronous integral demodulation(SID)algorithm is presented for closed-loop measurement and control circuit of MEMS gyro,which realizes the demodulation output of driving/detecting signal.The third-order synchronous integrator forms the demodulator.Simulation and analysis show that SID has a faster response time,a lower noise level,and less hardware resource consumption.Based on SID algorithm,a digital closed-loop measurement and control system for MEMS gyro is established.In the drive loop,PLL and automatic gain control technology are used to achieve gyro constant-amplitude constant-frequency resonance.In the detecting loop,high order band-passΣΔloop filters improves the bandwidth of gyro and responsiveness.The simulation results show that the gyro drive amplitude is 4.738μm,the start-up time is 0.12 s,the detecting bandwidth is 200 Hz,and the SNR is up to 113.2 d B.

关 键 词：微陀螺 同步积分解调 锁相环 自动增益控制 ΣΔ环路滤波器 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] Q213.2[自动化与计算机技术—控制科学与工程]