高灵敏度大量程六维力传感器设计  

Design of a six-axis force sensor with large range and high sensitivity

作　　者：韩康[1,2] 陈立恒 李行[1] 夏明一 吴清文[1,2] Han Kang;Chen Liheng;Li Hang;Xia Mingyi;Wu Qingwen(Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Science,Changchun 130033,China;College of materials Science and Opto-Electronic Technology,University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院长春光学精密机械与物理研究所,长春130033 [2]中国科学院大学材料与光电研究中心,北京100049

出　　处：《仪器仪表学报》2019年第9期61-69,共9页Chinese Journal of Scientific Instrument

基　　金：国家重点研发计划(2016YFE0205000)项目资助

摘　　要：为满足空间在轨组装望远镜地面装配试验的相关需求,综合考虑六维力传感器的量程、刚度和灵敏度等因素,设计了一种高灵敏度大量程六维力传感器。首先对经典十字梁六维力传感器进行数学建模,通过对比各通道单独作用时,应变梁表面应变和弹性体变形刚度的数学表达式,提出一套提高传感器灵敏度的改进方案;然后对传感器结构进行详细设计,并通过传感器的有限元仿真验证结构方案可行性;最后,对六维力传感器进行加工与标定,得到传感器线重复性误差小于0.33%FS,力通道测量灵敏度大于0.83 mV/V,力矩通道测量灵敏度大于2.6 mV/V。该六维力传感器各项性能优良,目前已应用于在轨组装望远镜地面实验当中。To meet relevant requirements of the assemble experiment of the orbit telescope,the factors of range,stiffness and sensitivity of six-axis force sensor are considered.In this way,a six-axis force sensor with large range and high sensitivity is designed.First,the mathematical model of the classical cross beam six axis-force sensor is formulated.The mathematical expressions of the surface strain of strained beam and the deformation stiffness of elastomer are compared.When each channel acts alone,a scheme for improving the sensitivity of sensor is presented.Then,the sensor structure is designed in detail,and the feasibility of the structure scheme is verified from the finite element analysis.Finally,the six-axis-dimensional force sensor is made and calibrated.Results show that the repeatability error is less than 0.33%FS,and the measurement sensitivity of the force channel and the moment channel is larger than 0.83 mV/V and 2.6 mV/V.The designed six-axis force sensor meets the requirements of the project and has been applied in the ground assemble experiment of the on-orbit telescope.

关 键 词：六维力传感器 刚度 灵敏度 最小二乘法标定 维间耦合 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]