基于FPGA的谐振陀螺正弦信号检测方法研究  

Research on detection method of sinusoidal signal of resonant gyroscope based on FPGA

作　　者：汤丽 郭锋[1] 刘玉县[2,3] 何春华 彭焮成[3] TANG Li;GUO Feng;LIU Yuxian;HE Chunhua;PENG Xincheng(Southwest University of Science and Technology,Mianyang 621010,China;National Key Laboratory of Science and Technology on Micro/Nano Fabrication,Peking University,Beijing 100871,China;Guangdong ShunDe Innovation Design Institute,Foshan 528311,China)

机构地区：[1]西南科技大学,四川绵阳621010 [2]北京大学微纳加工国家重点实验室,北京100871 [3]广东顺德创新设计研究院,广东佛山528311

出　　处：《传感器与微系统》2020年第2期4-6,10,共4页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(61434003)

摘　　要：硅微机械陀螺仪的驱动模态采用自激闭环的控制方式,实现陀螺在谐振频率上恒幅振荡。针对陀螺起振后的信号,设计基于CORDIC算法、LMS自适应算法及硬件频率计的正弦信号幅度和频率的检测系统,得到陀螺驱动模态振动幅值。实验表明:驱动响应信号的频率检测精度为0.5×10^-6,幅度检测精度为2×10^-6,振动幅值基本维持在0.800 V不变,证明了该检测系统的实用性。The driving mode of silicon micromachined gyroscope adopts the self-excited closed-loop control mode to achieve constant amplitude oscillation of the gyroscope on resonance frequency.Aiming at the signal after the gyroscope starts to vibration,the detection system of the sinusoidal signal amplitude and frequency based on CORDIC algorithm,LMS adaptive algorithm and hardware frequency meter is designed to obtain the vibration amplitude of the gyroscope driven mode.Experiments show that the frequency detection accuracy of the drive response signal is 0.5×10^-6,the amplitude detection accuracy is 2×10^-6,and the vibration amplitude is basically maintained at 0.800 V,which proves the practicability of the detection system.

关 键 词：硅微机械陀螺 闭环自激驱动 坐标旋转数字计算方法(CORDIC) 最小均方 频率计 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] V241[自动化与计算机技术—控制科学与工程]