一种窄带温补型声表面波滤波器  

A Narrowband Temperature Compensated SAW Filter

作　　者：冷俊林[1] 董加和[1] 陆川[1] 陈运祥[1] 李桦林 陈尚权 彭霄[1] 寇俊 唐永红 米佳[1] LENG Junlin;DONG Jiahe;LU Chuan;CHEN Yunxiang;LI Hualin;CHEN Shangquan;PENG Xiao;KOU Jun;TANG Yonghong;MI Jia(The 26th Institute of China Electronics Technology Group Corporation,Chongqing 400060,China)

机构地区：[1]中国电子科技集团公司第二十六研究所

出　　处：《压电与声光》2020年第1期67-70,共4页Piezoelectrics & Acoustooptics

基　　金：国家科技攻关计划基金资助项目

摘　　要：该文介绍了一种频率温度系数接近0的窄带温补型声表面波滤波器。该滤波器采用黑化的42°Y-X钽酸锂为衬底,温度补偿层材料采用二氧化硅薄膜,利用化学机械抛光二氧化硅薄膜法获得了平坦表面形貌。制作了温补型声表面波滤波器样品并进行了测试。测试结果表明,该温补型声表面波滤波器的中心频率约1360 MHz,在-55~85℃内频率漂移仅约390 kHz,频率温度系数约-2×10^-6/℃,插入损耗约1.3 dB。A narrowband temperature compensated SAW(TC-SAW)filter with near zero temperature coefficient of frequency(TCF)is developed in this work.The blackened 42°Y-X LiTaO 3 wafer was adopted as the substrate and SiO 2 film was used as the temperature compensated layer.A flattened SiO 2 thin film was obtained by CMP method.A TC-SAW filter prototype was fabricated and tested.The tested results showed that the TC-SAW filter had a center frequency of 1360 MHz and only 390 kHz frequency drift with temperature in the range of -55 ℃ to 85℃,the temperature coefficient of frequency(TCF)was about -2×10^-6/℃and insertion loss was about 1.3 dB.

关 键 词：声表面波滤波器 温补型声表面波 频率温度系数 

分 类 号：TN65[电子电信—电路与系统]