涂层组分对磁控溅射制备Ti600合金表面Ti-Al-N涂层组织微观结构的影响  

Effect of Ti/Al Ratio on Microstructure of Ti-Al-N Coatings Deposited by Magnetron Sputtering

作　　者：邹利华 李梦奇[1,2] 吴海江 李冬英[1,2] 周晓燕 宋恺心[1] Zou Lihua;Li Mengqi;Wu Haijiang;Li Dongying;Zhou Xiaoyan;Song Kaixin(School of Mechanical and Energy Engineering,Shaoyang University,Shaoyang 422000,China;Key Laboratory of Hunan Province for Efficient Power System and Intelligent Manufacturing,Shaoyang University,Shaoyang 422000,China;School of Information Engineering,Shaoyang University,Shaoyang 422000,China)

机构地区：[1]邵阳学院机械与能源工程学院,邵阳422000 [2]邵阳学院高效动力系统智能制造湖南省重点实验室,邵阳422000 [3]邵阳学院信息工程学院,邵阳422000

出　　处：《真空科学与技术学报》2019年第12期1130-1134,共5页Chinese Journal of Vacuum Science and Technology

基　　金：湖南省教育厅优秀青年项目(No.18B421);湖南省教育厅科研重点项目(No.18A384);高效动力系统智能制造湖南省重点实验室开放研究基金项目“动力系统关键部位高性能防护涂层制备及服役失效机理研究

摘　　要：以电弧复合磁控溅射沉积工艺在Ti600合金基体上沉积得到Ti-Al-N涂层,通过控制公转速度的方式来获得不同涂层组分,实验研究涂层组分对涂层组织微观结构的影响。研究结果表明:随着公转速度的增加,涂层内Ti/Al比表现出减小的变化。在涂层表面上形成了许多尺寸较大的颗粒与一些凹坑结构,较小Ti/Al比试样形成了少量的表面大颗粒,并得到致密组织结构。退火态和沉积态涂层形成了相近的表面形貌。涂层厚度发生了先升高后降低,2#试样达到了最大的沉积速率。随着深度的增加,Al,O元素的含量表现出先增加后降低的变化规律,在涂层6μm之后Ti和N元素含量得到明显的增加。当涂层内Ti/Al比例减小后,形成的Ti2AlN特征峰发生了先增大后降低的变化现象。为了提高Ti2AlN涂层的纯度与结晶度,应选择2#试样的制备工艺。The Ti-Al-N coatings were synthesized by arc magnetron co-sputtering on Ti600 alloy substrate.The influence of the annealing and Ti/Al ratio(controlled by sample revolution speed)on the microstructures,thickness and phase-structures was investigated with X-ray diffraction,energy dispersive spectroscopy and scanning electron microscopy.The results show that the synthesis conditions had a major impact.To be specific,as the Ti/Al ratio decreased,the as-deposited Ti-Al-N coatings became increasingly smooth and compact because of the decreases of droplet and pit densities and because of reduction of grain-size;the Ti2AlN phase and thickness changed in an increase-decrease manner after annealing.Moreover,the depth profiles of Al and O varied in an increase-decrease mode,at a depth≥6 μm,Ti-and N-contents significantly increased.We suggest that the optimized Ti/Al ratio be 2.36 in growth of Ti2AlN-phase dominant coatings.

关 键 词：磁控溅射 涂层组分 Ti-Al-N涂层 微观结构 

分 类 号：TB37[一般工业技术—材料科学与工程]