应用于电磁驱动器的非线性平面微弹簧及其集成制造工艺研究  

Research on Nonlinear Planar Micro-Springs for Electromagnetic MEMS Actuators and Their Integrated Manufacturing Methods

作　　者：邵秀锋 赵小林[1] 戴旭涵[1] 唐智勇 黄建泽 丁桂甫[1] SHAO Xiufeng;ZHAO Xiaolin;DAI Xuhan;TANG Zhiyong;HUANG Jianze;DING Guifu(National Key Laboratory of Micro/Nano Fabrication Technology Shanghai Jiao Tong University,Shanghai 200240,China)

机构地区：[1]上海交通大学微米/纳米加工技术国家级重点实验室,上海200240

出　　处：《传感技术学报》2020年第2期167-172,共6页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金项目(51875337)。

摘　　要：平面微弹簧是MEMS器件(如微驱动器、开关等)中一种常用的微结构。目前,平面非线性微弹簧的设计、制造与应用正日益成为关注的焦点。本文针对微机械电磁驱动器的需求,研制了一种变形量在100 μm左右,弹性变形力在5 mN附近的非线性变刚度微弹簧。研究包括通过仿真分析确定了弹簧的结构方案和影响因素,提出了配套的原位集成制造微加工工艺,并测试了所研制“V型”平面微弹簧的非线性特性,验证了所提出方案的可行性。为非线性弹簧的进一步设计和应用提供参考。Planar micro-springs are a common microstructure in MEMS devices(such as micro-relays,switches). Recently,considerable efforts has been focus on the design,manufacture and application of nonlinear planar micro-springs. In this paper,we have developed a nonlinear variable-stiffness micro-spring with a deformation of about 100μm and an elastic force of around 5mN for the requirements of micro-mechanical electromagnetic actuators. Firstly,the structural configuration and influencing factors of the spring were determined by simulation and analysis. Then the fully-integrated manufacturing micro-machining process was proposed,and the nonlinear characteristics of the developed V-shaped planar micro-spring were tested,which verified the feasibility of the proposed scheme. This paper provides a reference for the further design and application of nonlinear springs.

关 键 词：微机电系统 非线性平面微弹簧 仿真 集成制造 

分 类 号：TP393[自动化与计算机技术—计算机应用技术]