抗过载压电式工业装备振动监控MEMS加速度计的仿真分析与设计  

Emulational Analysis and Design of Anti Overload Piezoelectric MEMS Accelerometer For Vibration Monitoring of Industrial Equipment

作　　者：许高斌[1] 王超超 杨海洋 马渊明[1] 陈兴[1] XU Gao-bin;WANG Chao-chao;YANG Hai-yang;MA Yuan-ming;CHEN Xing(School of Electronic Science and Applied Physics,HeFei University of Technology,Hefei 230009,China)

机构地区：[1]合肥工业大学电子科学与应用物理学院,安徽合肥230009

出　　处：《仪表技术与传感器》2020年第2期28-32,55,共6页Instrument Technique and Sensor

基　　金：装备预研教育部联合基金项目(6141A02022422);安徽省重点研发计划(1804a09020018)。

摘　　要：针对工业装备振动监控对测振传感器的实际需要,设计了一种具有全方位抗过载结构的压电式加速度计,通过MATLAB对本征频率与灵敏度进行理论分析并做出结构参数优化设计,同时通过有限元分析软件ANSYS对所设计的传感器结构进行三维建模,添加力-电多物理场耦合等载荷进行静力、模态及动力等仿真分析,验证设计可行性,进一步确定结构参数,得出该结构压电式加速度计的本征频率、灵敏度及线性度仿真结果分别为29.8 kHz、0.2 mV/g和0.11%。In the light of the vibration monitoring requirements of industrial equipment,a piezoelectric accelerometer which has a structure for anti overload in all directions was designed.The structural parameters were optimized on the basis of theoretical analysis on the nature frequency and sensitivity of accelerometer by MATLAB.At the same time,the 3D model of the sensor structure was built by the finite element analysis software-ANSYS,and the load of mechanical-electrical multi-physical field coupling was added in order to carry out the static analysis,modal analysis and dynamic analysis to verify the feasibility of design and further determined the structural parameters.The simulation results of intrinsic frequency,sensitivity and linearity of the piezoelectric accelerometer are 29.8KHz,0.2mV/g and 0.11%.

关 键 词：MEMS 抗过载 压电式加速度计 工业装备振动监控 L形梁 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]