压电式二维微定位平台的率相关迟滞建模  

Rate-dependent modeling of a piezoelectric two-dimensional micro positioning stage

作　　者：胡俊峰[1] 何建康 杨明立 HU Junfeng;HE Jiankang;YANG Mingli(School of Mechanical&Electrical Engineering,Jiangxi University of Science and Technology,Ganzhou 341000,China)

机构地区：[1]江西理工大学机电工程学院,江西赣州341000

出　　处：《振动与冲击》2020年第6期104-110,131,共8页Journal of Vibration and Shock

基　　金：国家自然科学基金(51565016,51865016);江西省杰出青年人才资助计划项目(20171BCB23063);江西省自然科学基金(20171BAB206029);江西省教育厅科学技术研究项目(GJJ160612);江西理工大学清江青年英才支持计划资助(JxusTQJ13J2018006)。

摘　　要：为了描述压电式多维微定位平台的率相关迟滞非线性特性,提出了一种基于Hammerstein模型的建模方法。以一种二维微定位平台为对象,平台动态模型是由静态迟滞非线性部分和一个线性动态系统部分串联组成。静态非线性部分由改进的Prandtl-Ishlinskii模型描述,线性动态系统部分由外因输入自回归模型(ARX)模型描述,并给出了模型参数辨识方法。为了验证所建立的Hammerstein模型有效性,搭建了实验平台进行实验验证。实验结果表明,对平台施加不同频率电压信号,由Hammerstein模型得到的预测位移和实测位移相对误差范围为1%~5%,预测位移与实测位移接近,说明所建立的模型能精确描述微定位平台的率相关迟滞特性。In order to describe the rate-dependent hysteresis nonlinearity of piezoelectric multi-dimensional micro-positioning stages,a modeling method was proposed based on the Hammerstein model.The dynamic model of a two-dimensional micro-positioning stage was composed of a static hysteretic nonlinear part and a linear dynamic system in series.The static nonlinear part was described by an modified Prandtl-Ishlinskii model(MPI),and the linear dynamic system was described by the autoregressive model with exogenous input(ARX).The model parameter identification method was also given out.In order to verify the validity of the Hammerstein model,an experimental platform was set up for experimental verification.The experimental results show that the relative errors between the predicted displacements derived by the Hammerstein model and measured displacements is 1%—5%by applying different frequency voltage signals to the stage.The predicted displacements are close to the measured displacements,which shows that the presented model can accurately describe the rate-dependent hysteresis characteristics of the micro-positioning stage.

关 键 词：压电陶瓷驱动器 HAMMERSTEIN模型 微定位平台 率相关迟滞特性 

分 类 号：TH703[机械工程—仪器科学与技术] TN384[机械工程—精密仪器及机械]