高过载MEMS环形陀螺制造与测试  

Manufacture and Test of High Overload MEMS Ring Gyroscope

作　　者：张英杰 康强 曹慧亮[1,2] 石云波[1,2] 刘俊[1,2] ZHANG Ying-jie;KANG Qiang;CAO Hui-liang;SHI Yun-bo;LIU Jun(Key Laboratory of Instrumentation Science and Dynamic Measurement,Ministry of Education,North University of China,Taiyuan 030051,China;Key Laboratory of Science and Technology on Electronic Test&Measurement,NorthUniversity of China,Taiyuan 030051,China;Norinco Group Test and Measuring Academy,Huayin 714200,China)

机构地区：[1]中北大学,仪器科学与动态测试教育部重点实验室,山西太原030051 [2]中北大学,电子测试技术国防科技重点实验室,山西太原030051 [3]中国兵器工业试验测试研究院,陕西华阴714200

出　　处：《仪表技术与传感器》2020年第3期9-14,共6页Instrument Technique and Sensor

基　　金：国家自然科学基金国家重大科研仪器研制项目(51727808);国家自然科学基金资助项目(51705477);山西省回国留学人员科研资助项目(2016-083);中北大学电子测试技术重点实验室开放基金(ZDSYSJ2015004)。

摘　　要：提出了一种新型的抗高过载环形振动式陀螺,分析了其工作原理和振动特性。在ANSYS有限元分析软件中建立了该环形陀螺结构的模型,进行了振动特性分析,仿真分析结果显示该环形陀螺工作模态与干扰模态最小频差Δf 2=248 Hz,驱动和敏感模态频率Δf 1=5 Hz。并且根据冲击动力学原理分析了此结构在半周期正弦加速度冲击载荷作用下的冲击响应,谐振结构最大位移为14.142μm,结构所受的最大的应力为68.396 MPa,可以正常稳定工作。通过基于SOG(Silicon on Glass)的微加工工艺制造了陀螺样机并完成了初步的测试,模态测试与有限元仿真结果中的模态频率最大误差是4.9%。实验室过载测试结果显示陀螺在15800 g过载下,陀螺工作频率和频差未发生大的变化。In this paper,a new type of anti-high overload ring-shaped vibrating gyroscope was proposed,and its working principle and vibration characteristics were analyzed.The model of the ring gyro structure was established in ANSYS finite element analysis software,and the vibration characteristics were analyzed.The simulation analysis results show that the minimum frequency difference between the working mode and the interference mode of the ring gyroscope is Δf 2=248 Hz,and the driving and detecting mode frequency is Δf 1=5 Hz.According to the principle of impact dynamics,the impact response of the structure under the action of half-cycle sinusoidal acceleration was analyzed.The maximum displacement of the resonant structure is 14.142μm,and the maximum stress of the structure is 68.396MPa,which can work normally and stably.The gyro prototype was fabricated by the SOG micromachining process and the preliminary test was completed.The maximum error of the modal frequency in the modal test and the finite element simulation results was 4.9%.The laboratory overload test results show that the gyro s operating frequency and frequency difference are not changed greatly under the overload of 15800 g.

关 键 词：高过载 微机械系统 环形 陀螺 有限元分析 测试 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]