几种含氟电子气体发展的思考  

Opinions on development of several fluorine-containing electronic gases

作　　者：牛学坤 杨茂良 周宪峰 Niu Xuekun;Yang Maoliang;Zhou Xianfeng(Liming Research&Design Institute of Chemical Industry Co.,Ltd.,Luoyang 471000,China;China Haohua Chemical Group Co.,Ltd.,Beijing 100101,China)

机构地区：[1]黎明化工研究设计院有限责任公司,河南洛阳471000 [2]中国昊华化工集团股份有限公司,北京100101

出　　处：《化学推进剂与高分子材料》2020年第2期1-4,27,共5页Chemical Propellants & Polymeric Materials

摘　　要：介绍了三氟化氮、六氟化钨、四氟化碳、电子级六氟化硫等几种含氟电子气体在半导体、平板显示等领域的应用。对相关行业发展的现状和前景进行了分析和预测,讨论了行业发展的潜在风险。The applications of several fluorine-containing electronic gases including nitrogen trifluoride,tungsten hexafluoride,carbon tetrafluoride and electronic grade sulfur hexafluoride,etc.in the fields of the semiconductor,flat panel display and so on are introduced.The current situation and prospects of the development of the relevant industries are analyzed and forecast,and the potential ventures in the development of the industries are discussed.

关 键 词：含氟电子气体 三氟化氮 六氟化钨 四氟化碳 电子级六氟化硫 

分 类 号：TQ117[化学工程—无机化工]