一种新型小型化高抽速的复合吸气泵  

A New Combination Pump with High Sorption Speed and Small Size

作　　者：郭卫斌 薛函迎 柴云川 王浏杰 GUO Wei-bin;XUE Han-ying;CHAI Yun-chuan;WANG Liu-jie(Nanjing Huadong Vacuum Material Co.,Ltd.,Nanjing 210034,China)

机构地区：[1]南京华东电子真空材料有限公司,江苏南京210034

出　　处：《真空电子技术》2020年第2期39-43,共5页Vacuum Electronics

摘　　要：本文介绍了一种高抽速体积小巧的由溅射离子泵和吸气剂泵组合而成的复合泵,其特别适用于超高真空实验室设备、便携式真空仪器等领域。其采用吸气剂泵作为主泵,用一个小型离子泵安装在吸气剂泵的支架内用来抽除吸气剂泵无法抽除的甲烷、惰性气体等,具有结构紧凑、体积小巧、便于安装和维护,抽速高等特点。The article introduces a kind of combination pump suit for ultra-high vacuum system or portable instruments. In this pump, a non-evaporable getter pump(NEGP) acts as the main pumping element, leaving to a small sputter ion pump(SIP) the ancillary task of removing noble gases and methane, which are not absorbed by the NEG. The SIP is mounted in the support of the getter cartridge. This design allows achieving high pumping speed in a very small package as well as delivering interesting pumping synergies.

关 键 词：超高真空 溅射离子泵 吸气剂泵 复合泵 

分 类 号：TB752[一般工业技术—真空技术]