基于电容式微加速度计的信号调理电路的设计与标定  

Design and Calibration of Signal Conditioning Circuit Based on Capacitive Micro-Accelerometer

作　　者：周泉 李桂安 ZHOU Quan;LI Guian(Sanjiang University,School of Electronic Information Engineering,Nanjing 210012,China;Southeast University,Electrical and Electronic Experimental Center,Nanjing 210096,China)

机构地区：[1]三江学院电子信息工程学院,南京210012 [2]东南大学电工电子实验中心,南京210096

出　　处：《电子器件》2020年第2期366-371,共6页Chinese Journal of Electron Devices

摘　　要：为了提高MENS微加速度计的各种性能,完成了基于电容式微加速度计的过载传感器信号调理电路的设计。设计了基于Model 1221电容式微加速度计的信号调理电路,通过静态和动态调试,在频率响应范围内的带内不平度≤±3 dB,超出频率响应范围的带外衰减≥30 dB/oct。最后通过传感器主动校准系统对传感器进行标定测试,测试结果显示:理论值与实际值的误差很小,系统的准确度很高,而且在±15 gn的测量范围内的输出电压满足(0.2±0.2)V^(4.8±0.2)V。In order to improve the performance of MENS micro accelerometer,the signal conditioning circuit of overload sensor based on capacitive micro accelerometer is designed. For the accelerometer,a signal conditioning circuit based on Model 1 221 capacitive micro-accelerometer is designed. Through static and dynamic debugging,the in-band irregularity within the frequency response range is less than 3 dB,and the out-band attenuation beyond the frequency response range is more than 30 dB/oct. Finally,the sensor is calibrated by the sensor active calibration system. Through the calibration test,it can be found that the error between the theoretical value and the actual value is very small,the accuracy of the system is very high,and the output voltage within the measurement range of(+15 gn)meets the design requirements of(0.2±0.2)V^(4.8±0.2)V.

关 键 词：微机电系统 电容式微加速度计 信号调理电路 调试 标定 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]