基于MSM结构的表面等离子体共振光纤折射率传感器  

Surface Plasmon Resonance Fiber Refractive Index Sensor Based on MSM Structure

作　　者：郭志勇 葛益娴[1,2] 沈令闻 张鹏 顾钦顺[1] GUO Zhiyong;GE Yixian;SHEN Lingwen;ZHANG Peng;GU Qinshun(School of Electronics&Information Engineering,Nanjing University of Information Science&Technology,Nanjing 210044,CHN;Jiangsu Collaborative Innovation Center of Atmospheric Environment and Equipment Technology,Nanjing 210044,CHN)

机构地区：[1]南京信息工程大学电子与信息工程学院,南京210044 [2]江苏省大气环境与装备技术协同创新中心,南京210044

出　　处：《半导体光电》2020年第2期205-210,共6页Semiconductor Optoelectronics

基　　金：国家自然科学基金项目(61307061);江苏高校优势学科Ⅲ期建设工程资助项目.

摘　　要：基于表面等离子体共振(SPR)效应,设计了一种基于多模-单模-多模(MSM)结构的光纤折射率传感器。采用光纤熔接的方式构成MSM结构,并且在单模光纤的表面涂覆二氧化钛/银(TiO2/Ag)复合膜构成传感单元。利用FDTD Solutions仿真分析了单模光纤长度与金属膜厚度对传感器性能的影响。结果表明:单模光纤长度越长,共振深度越深;TiO2/Ag复合膜中Ag膜厚度为50nm,TiO2膜厚度为20nm时,传感器性能最优,在1.33~1.41环境折射率范围内,传感器的灵敏度约为6 875nm/RIU。实验结果表明该光纤折射率传感器结构制作工艺简单、灵敏度高。Based on the surface plasmon resonance(SPR)effect,a fiber-optic refractive index sensor based on a multimode-singlemode-multimode(MSM)structure was designed.The structure of the MSM is constructed by optical fiber fusion,and the surface of the single-mode optical fiber is coated with a titanium dioxide/silver(TiO2/Ag)composite film to form a sensing unit.The effects of single-mode fiber length and metal film thickness on sensor performance were analyzed using FDTD Solutions.The results show that the longer the single-mode fiber length,the deeper the resonance depth;when the thickness of the Ag film is 50 nm,and the thickness of the TiO2 film is 20 nm,the sensor can obtain the best performance.In the range of 1.33~1.41 ambient refractive index,the sensor has a sensitivity of approximately 6 875 nm/RIU.Experimental results show that the optical fiber refractive index sensor has a simple manufacturing process and high sensitivity.

关 键 词：光纤传感器 表面等离子体共振 MSM结构 折射率 复合膜 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]