玻璃纤维增强SU-8胶技术  

Glass Fiber Reinforced SU-8 Technology

作　　者：王惟圣 周文文 丁桂甫[1] Wang Weisheng;Zhou Wenwen;Ding Guifu(School of Electronic Information and Electrical Engineering,Shanghai Jiaotong University,Shanghai 200240,China)

机构地区：[1]上海交通大学电子信息与电气工程学院,上海200240

出　　处：《微纳电子技术》2020年第4期324-327,共4页Micronanoelectronic Technology

摘　　要：SU-8胶是一种能够以低成本制作高深宽比微结构的负性光刻胶,在非硅微电子机械系统(MEMS)领域具有广阔的应用前景。针对SU-8胶作为微结构材料时,其弹性模量和断裂强度较低的特性,采用透明度高的微细玻璃纤维作为增强相材料,制备玻璃纤维/SU-8复合材料。开发出一种既能够增强成型后SU-8微结构机械强度,又不影响SU-8可直接光刻成型能力的改性技术。通过光学显微镜和扫描电子显微镜(SEM)对该复合材料的微观结构进行了分析和表征。同时,利用拉伸实验对复合材料的机械性能进行测试。实验结果表明,在不改变紫外光刻电铸(UV-LIGA)的光刻-显影工艺特征的条件下该复合材料的弹性模量(1 613 MPa)、断裂伸长率(1.63%)和断裂强度(26.7 MPa)均比纯SU-8胶材料有较大提升。SU-8 is a negative photoresist that can fabricate high aspect ratio microstructures at a low cost and has broad application prospects in the field of non-silicon micro-electromechanical system(MEMS).As a microstructural material,SU-8 has the characteristics of low elasticity modulus and low breaking strength.In view of that,the high transparent glass microfibers was used as a reinforcing material to prepare a glass fiber/SU-8 composite material.The developed modification technology can not only enhance the mechanical strength of the patterned SU-8 microstructure,but also remain the capability of SU-8 to be patterned directly by lithography.The microstructure of the composite was analyzed and characterized by optical microscopy and scanning electron microscopy(SEM).Meanwhile,the mechanical properties of the composites were tested by the tensile experiment.The test results show that without changing the lithography and development characteristics of UV-LIGA,the elastic modulus(1 613 MPa),elongation at break(1.63%)and breaking strength(26.7 MPa)of the composites are greatly improved compared to those of pure SU-8 materials.

关 键 词：SU-8胶 玻璃纤维 复合材料 光刻胶 微电子机械系统(MEMS) 

分 类 号：TN405[电子电信—微电子学与固体电子学]