激光修调法对LTCC内埋电阻的精确控制  

The Tight Control of LTCC Buried Resistor by Laser Trimming

作　　者：杨兴宇 张艳辉 乔璐 贾少雄 李俊 YANG Xingyu;ZHANG Yanhui;QIAO Lu;JIA Shaoxiong;LI Jun(China Electronics Technology Group Corporation No.2 Research Institute,Taiyuan 030024,China)

机构地区：[1]中国电子科技集团公司第二研究所,太原030024

出　　处：《电子与封装》2020年第6期17-23,共7页Electronics & Packaging

摘　　要：低温共烧陶瓷(Low Temperature Co-fired Ceramic,LTCC)技术具有集成无源元件的优势。LTCC内埋电阻因其内部埋置的特点,无法实现烧结后精确调阻,对印刷工艺水平要求较高,且波动范围较大。主要讨论了印刷工艺下影响电阻的各参数引起的电阻波动范围,提出并采用一种印刷后激光修调电阻的方式,使内埋电阻的阻值波动范围控制到±16%。Low temperature co-fired ceramic(LTCC)technology has the advantage of integrating passive components.Because of the characteristics of internal embedment,the resistance of LTCC can not be adjusted accurately after sintering,so it requires high level of printing technology and has a large fluctuation range.This paper mainly discusses the range of resistance fluctuation caused by the parameters affecting the resistance in the printing process,and adopts a way of laser trimming to adjust the resistance.As a result,the range of resistance fluctuation of the embedded resistance remains at±16%.

关 键 词：LTCC 内埋电阻 波动范围 激光修调 

分 类 号：TN305[电子电信—物理电子学]