基于非磁性材料Cr/Au的VCSEL欧姆接触特性  

Ohmic Contact Properties of VCSEL Based on Non-Magnetic Material Cr/Au

作　　者：宋金伟[1] 张峰 郭艳玲 关宝璐 Song Jinwei;Zhang Feng;Guo Yanling;Guan Baolu(Hangzhou Silan Inter grated Circuits Co.,Ltd.,Hangzhou 310018,China;Key Laboratory of Opto-Electronics Technology of Ministry of Education,Faculty of Information Technology,Beijin g University of Technology,Beijing 100124,China)

机构地区：[1]杭州士兰集成电路有限公司,杭州310018 [2]北京工业大学信息学部,光电子技术教育部重点实验室,北京100124

出　　处：《微纳电子技术》2020年第6期430-435,449,共7页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(60908012,61575008,61775007);北京市自然科学基金资助项目(4172011)。

摘　　要：采用圆点传输线模型(CDTLM),对基于非磁性材料Cr/Au的垂直腔面发射激光器(VCSEL)n型GaAs欧姆接触系统进行了研究。实验结果表明,在400℃下退火35 s后,基于非磁性材料Cr/Au (50 nm/300 nm)的n型GaAs欧姆接触系统具有低的比接触电阻率,其值为2.5×10^-6Ω·cm^2。在高合金温度下,基于Cr/Au的欧姆接触系统性能得到了改善。将非磁性材料Cr/Au应用到整个VCSEL结构设计中,当工作温度从20℃升高到50℃时,VCSEL的阈值电流保持在0.65~1 mA,最大输出光功率达到1.71 mW。此外,运用电导数法深入分析了基于Cr/Au电极的VCSEL的可靠性,结果表明基于非磁性材料Cr/Au的VCSEL可以实现良好的金属-半导体界面状态,并具有低的阈值电流和较小的并联非线性电阻,从而获得了低的器件退化率和优异的热稳定性。The n-GaAs ohmic contact system of the vertical cavity surface emitting laser(VCSEL)based on non-magnetic material Cr/Au was studied by circular dot transmission line model(CDTLM).The experimental results show that after being annealed at 400 ℃ for 35 s,the ntype GaAs ohmic contact system based on non-magnetic material Cr/Au(50 nm/300 nm)has a low specific contact resistivity of 2.5×10^-6Ω·cm^2.At high alloy temperatures,the performance of the Cr/Au-based ohmic contact system is improved.The non-magnetic material Cr/Au was applied to the whole structure design of the VCSEL.The threshold current of the VCSEL remains at 0.65-1 mA with the operating temperature increasing from20 ℃ to 50 ℃,and the maximum output optical power reaches 1.71 mW.In addition,the electric derivative method was used to analyze the reliability of the VCSEL based on the Cr/Au electrode.The results show that the VCSEL based on the non-magnetic material Cr/Au can achieve a good metal-semiconductor interface state,and has a low threshold current and a small parallel nonlinear resistance,thereby achieving a low device degradation rate and excellent thermal stability.

关 键 词：垂直腔面发射激光器(VCSEL) 圆点传输线模型(CDTLM) 非磁性材料Cr/Au 比接触电阻率 欧姆接触 

分 类 号：TN365[电子电信—物理电子学]