CVD纳米金刚石@碳化硅复合粉末导热填料制备工艺研究  

Preparation of Nano Diamond@Silicon Carbide Composite Powder as Thermal Conductive Filler

作　　者：关春龙[1] 秦越 易剑 虞锦洪[2] 江南[2] GUAN Chunlong;QIN Yue;YI Jian;YU Jinhong;JIANG Nan(School of Materials Sciences&Engineering,Henan University of Technology,Zhengzhou 450007,Henan,China;Ningbo Institute of Materials Technology&Engineering,Chinese Academy of Sciences,Ningbo 315201,Zhejiang,China)

机构地区：[1]河南工业大学材料科学与工程学院,河南郑州450007 [2]中国科学院宁波材料技术与工程研究所,浙江宁波315201

出　　处：《陶瓷学报》2020年第3期377-383,共7页Journal of Ceramics

基　　金：宁波市“科技创新2025”重大专项(2018B10046);国家重点研发计划(2017YFE0128600);宁波市“3315计划”(2019A-18-C);国防重点实验室基金(6142807180511,6142905192806);河南省科技攻关项目(192102210244)。

摘　　要：通过改变甲烷浓度、热丝功率、热丝丝距以及沉积时间等参数,利用热丝化学气相沉积(HFCVD)工艺,在β-碳化硅(β-SiC)粉末上沉积了一层纳米金刚石(ND)涂层,制备了ND@SiC复合粉末导热填料,并利用扫描电子显微镜、拉曼光谱、透射电子显微镜以及热重分析等,对所得填料进行了表征。结果表明,SiC粉末表面涂覆了一层纳米金刚石涂层,形成了ND@SiC结构;当沉积参数为甲烷浓度5%、热丝功率4×1000 W、热丝丝距8 mm,沉积时间2×3 h时,制备的ND@SiC复合粉末具有理想的显微结构,复合粉末中金刚石的含量占粉体总重量的9.31%。Through changing variables,such as methane concentration,hot filament power,hot filament distance and deposition time,a layer of nano diamond(ND)was coated onβ-silicon carbide(β-SiC)powder by using hot filament chemical vapor deposition(HFCVD)technology.The prepared powderswere characterized by using scanning electron microscopy(SEM),transmission electron microscopy(TEM),Raman spectroscopy and thermogravimetric analysis.It was found that the structure of the ND@SiC composite powder is optimized with methane concentration of 5%,hot filament power of 4×1000 W(4 hot filaments and 1000 W power each),hot filament distance of 8 mm and time of 2×3 h.The ND@SiC composite powder has a diamond content of 9.31 wt.%.

关 键 词：纳米金刚石 碳化硅 热丝化学气相沉积 导热填料 

分 类 号：TQ174.75[化学工程—陶瓷工业]