高Q值GaN碟状微米谐振腔的光学特性研究  

Study of Optical Properties of High-Q GaN Disk-Shaped Microresonant Cavity

作　　者：何耿 徐俞[4] 曹冰 王钦华[1,2,3] 徐科 Geng He;Yu Xu;Bing Cao;Qinhua Wang;Ke Xu(School of Optoelectronic Science and Engineering,Soochow University,Suzhou,Jiangsu 215006,China;Jiangsu Key Laboratory of Advanced Optical Manufacturing Technologies,Soochow University,Suzhou,Jiangsu 215006,China;Key Laboratory of Modern Optical Technologies,Ministry of Education,Soochow University,Suzhou,Jiangsu 215006,China;Suzhou Institute of Nano-Tech and Nano-Bionics,Chinese Academy of Sciences,Suzhou,Jiangsu 215123,China)

机构地区：[1]苏州大学光电科学与工程学院,江苏苏州215006 [2]苏州大学江苏省先进光学制造技术重点实验室,江苏苏州215006 [3]苏州大学教育部现代光学技术重点实验室,江苏苏州215006 [4]中国科学院苏州纳米技术与纳米仿生研究所,江苏苏州215123

出　　处：《光学学报》2020年第12期172-176,共5页Acta Optica Sinica

基　　金：国家自然科学基金国家重点项目(61734008);国家自然科学基金(61574097,61604170,61604169);国家重点研发计划(2017YFB0404100);国家重大科研仪器设备研制专项(11327804)。

摘　　要：通过氢化物气相外延(HVPE)方式在蓝宝石衬底上获得了GaN微米碟,其几何形态为规则的正六边形且表面平整,直径约为27μm,高度为15μm。光致发光(PL)实验结果表明,微米碟垂直方向和水平方向的光学谐振模式存在差异,其中水平方向支持回音壁模式(WGM)振荡。在室温条件下采用高能脉冲激光照射微米碟,当激励光功率超过7.8μW时,PL光谱在波长374 nm附近获得多模式激光信号,其中WGM激光占优势,品质因子可达3742。最后采用COMSOL仿真软件对谐振腔进行光场模拟,并分析了其光学模式特性。In this study,a GaN microdisk is fabricated on a sapphire substrate by hydride vapor phase epitaxy(HVPE).The microdisk has a flat surface and a regular hexagonal shape with a diameter and height of approximately 27μm and 15μm,respectively.Photoluminescence(PL)experimental results show that the optical resonance modes of the microdisk are different in the vertical and horizontal orientations,with the latter supporting the whispering gallery mode(WGM)oscillation.When the microdisk is irradiated by a high-energy pulsed laser at room temperature with an excitation light power larger than 7.8μW,a multimode laser signal near 374 nm wavelength is obtained in the PL spectra,in which the WGM laser is dominant,and the quality factor can reach 3742.Finally,using the COMSOL simulation software,a light field simulation is performed on the resonant cavity to analyze its optical mode characteristics.

关 键 词：光学器件 氮化镓 回音壁模式 微米碟激光器 紫外激光 

分 类 号：O436[机械工程—光学工程]