铜基空气微同轴工艺技术  

Copper-Based Air-Filled Micro-Coaxial Technology

作　　者：史光华[1] 王建 徐达[1] 郭诚 常青松[1] 王真 周彪[1] 张延青 Shi Guanghua;Wang Jian;Xu Da;Guo Cheng;Chang Qingsong;Wang Zhen;Zhou Biao;Zhang Yanqing(The 13th Research Institute.CETC,Shijiazhuang 050051,China;School of Information and Communication Engineering,Xi’An Jiaotong University,Xi’An 710049,China)

机构地区：[1]中国电子科技集团公司第十三研究所,石家庄050051 [2]西安交通大学信息与通信工程学院,西安710049

出　　处：《微纳电子技术》2020年第8期597-603,共7页Micronanoelectronic Technology

摘　　要：铜基空气微同轴传输线是由悬空的中心内导体、将其包围的接地外导体和周期性介质支撑结构组成。与传统的平面微带器件相比,基于微同轴工艺研制的毫米波器件具有宽频带、高隔离度、低损耗、高功率容量等特点,同时又保留了平面微带器件集成度高等优势。系统地研究了铜基空气微同轴结构及制备工艺,并利用该工艺制备了W波段微同轴传输线和功率合成器。样件测试结果显示,基于微同轴技术的射频器件在高频下表现出可以与波导结构制作的器件相比拟的插入损耗和合成效率,在110 GHz处实测的传输线插入损耗≤0.045 dB/mm,功率合成器的一级合成效率(即两路合成)大于92%。该测试结果证明了微同轴结构及工艺的有效性和可靠性。The Cu-based air-filled micro-coaxial transmission line consists of the impending center inner conductor,the surrounding ground outer conductor and the periodically dielectric supporting structure.Compared with the conventional planner micro-strip devices,the millimeter-wave devices developed by the micro-coaxial process have the advantages of wide bandwidth,high isolation,low loss and large power capacity.Meanwhile,the merits of planer micro-strip devices such as high level of the integration can be preserved.The Cu-based air-filled micro-coaxial structure and the fabrication technology were systematically researched,and a series of W-band micro-coaxial transmission lines and power combiners were fabricated with the technology.Test results of the samples show that the radio frequency(RF)devices based on the micro-coaxial technology exhibit comparable insertion loss and power combine efficiency with those based on the waveguide structure at high frequencies.At 110 GHz,the measured insertion loss of the transmission line≤0.045 dB/mm,and the first-stage(two-way combination)combine efficiency of the power combiner is larger than92%,proving the validity and reliability of the micro-coaxial structure and technology.

关 键 词：微同轴 高频低损耗 功率合成器 毫米波(MMW) 射频微电子机械系统(RF MEMS) 

分 类 号：TH703[机械工程—仪器科学与技术]