压电陶瓷驱动器迟滞建模与自适应控制  

Hysteresis Modelling and Adaptive Control of Piezoelectric Actuators

作　　者：王舟 陈远晟[1] 王浩[1] 黄勤斌 WANG Zhou;CHEN Yuansheng;WANG Hao;HUANG Qinbin(School of Energy and Power Engineering,Nanjing University of Science and Technology,Nanjing 210094,China)

机构地区：[1]南京理工大学能源与动力工程学院,江苏南京210094

出　　处：《压电与声光》2020年第4期523-528,共6页Piezoelectrics & Acoustooptics

基　　金：国防基础加强基金资助项目(2017-JCJQ-ZD-006)。

摘　　要：为了降低压电陶瓷驱动器的迟滞非线性,提出了改进型的Maxwell-slip模型并引入自适应控制,使压电驱动器在宽频带下有良好的迟滞补偿效果。在经典Maxwell-slip模型中,输出力与输入位移的关系会出现迟滞现象,表现为平行四边形,与压电陶瓷驱动器的迟滞特性接近。由于每一单元滑块的最大静摩擦力与弹簧弹性系数成比例关系,若弹簧系数取定值时,每一个单元的最大静摩擦力在系统实时控制中是不变的,因此可以采用自适应控制算法对输出信号权值进行更新,从而更精确地补偿压电陶瓷驱动器。为了验证该模型,搭建了悬臂梁结构压电实验平台,运用该迟滞模型进行迟滞补偿控制,实验结果表明,对于Maxwell-slip模型自适应控制,在0.1~20 Hz宽频带下的均方根误差(RMSE)和绝对平均误差(MAE)均有减小。其中,在0.1 Hz下无前馈补偿控制的RMSE为0.0375μm,而通过自适应控制可以将压电微定位平台的RMSE降低到0.0124μm以内。与经典模型相比,所提出的Maxwell-slip模型自适应控制具有在宽频带内进行精密定位的优点。An improved Maxwell-slip model with adaptive control is proposed to reduce the hysteresis nonlinearity of the piezoelectric ceramic actuator,so that it has good hysteresis compensation in a wide frequency band.In classic Maxwell-slip model,the relationship between output force and input displacement will exhibit hysteresis,appearing as a parallelogram,which is close to the hysteresis characteristics of piezoelectric actuators.Since the maximum friction force of each unit slider is proportional to the spring elastic coefficient,if the spring coefficient is a fixed value,then the maximum friction force of each unit is constant in the system real-time control,the output value can be updated by using the adaptive control algorithm,and the input voltage of the piezoelectric actuator can be compensated.To validate the proposed model,a piezoelectric experimental platform was built,and the hysteresis model was used for hysteresis compensation control.The experimental results show that,for the adaptive control of Maxwell-slip model,the root mean square error and mean absolute deviation error in the 0.1~20 Hz wide frequency band are reduced.The displacement error is 0.0375μm without control at 0.1 Hz,and the adaptive control method can reduce the positioning error of the piezoelectric micro-positioning platform within 0.0124μm.Compared with the classic methods,the proposed adaptive control has the advantages of precision positioning in wide frequency band.

关 键 词：压电陶瓷驱动器 Maxwell-slip模型 自适应控制 迟滞补偿 

分 类 号：TN384[电子电信—物理电子学] TM282[一般工业技术—材料科学与工程]