面向自动驾驶的硅基激光雷达发展和关键技术研究  

Research on the Development and Key Technologies of Silicon-based Lidar for Autopilot

作　　者：周砚扬 张芮闻 何立平 章宇兵[1] 陆洲[1] 许维翰 ZHOU Yan-yang;ZHANG Rui-wen;HE Li-ping;ZHANG Yu-bing;LU Zhou;XU Wei-han(China Academy of Electronics and Information Technology,Beijing 100041,China;Shanghai Jiao Tong University,Shanghai 200240,China)

机构地区：[1]中国电子科学研究院,北京100041 [2]上海交通大学,上海200240

出　　处：《中国电子科学研究院学报》2020年第7期678-684,共7页Journal of China Academy of Electronics and Information Technology

基　　金：国家自然科学基金青年基金(61904163)。

摘　　要：文中首先介绍了激光雷达的研究背景,并对三种激光雷达的解决方案优劣进行了对比;然后,对基于硅光相控阵列技术的激光雷达研究进行总结,对FMCW激光雷达的原理进行论述;接着,对硅光相控阵列技术的研究成果进行介绍,包括功分网络、光相控阵列和天线阵列,并设计一维硅基相控阵芯片,测试结果表明该相控阵芯片可以实现扫描范围±25°,波束宽度6.71°;最后,针对硅基波导饱和功率的限制,导致产品实用化难的问题,提出了氮化硅波导的解决方案。This paper firstly reports the research background of lidar and makes a comparison of three solutions.The research on lidar based on the silicon optical phase array is summarized.The principle of frequency modulated continue wave lidar is also discussed.then research results on the silicon optical phase array are reported,including power splitting network,optical phase array and antenna array.One dimension silicon optical phase array chip is designed and the measurement results show this chip can achieve a scan range of±25°and a beam width of 6.71°.Finally,in order to solve the saturation power in silicon waveguide which limits the application,the SiN waveguide process is proposed.

关 键 词：激光雷达 硅基相控阵 硅波导 

分 类 号：TN491[电子电信—微电子学与固体电子学]