基于纳米压印和键合制造尺寸可控的微/纳米流体芯片研究  

Research on Micro/Nanofluidic Chips with Controllable Dimensions Based on Nanoimprinting and Bonding

作　　者：黄达 张然[1] 樊元义 刘骁 褚金奎[1] Huang Da;Zhang Ran;Fan Yuanyi;Liu Xiao;Chu Jinkui(Key Laboratory for Precision&Non-traditional Machining Technology,Ministry of Education,Dalian University of Technology,Dalian,Liaoning 116024,China)

机构地区：[1]大连理工大学精密与特种加工教育部重点实验室,辽宁大连116024

出　　处：《机电工程技术》2020年第8期26-29,共4页Mechanical & Electrical Engineering Technology

摘　　要：微纳流控芯片在生物、医学等领域有着重要的应用价值。针对纳米压印技术进行微纳流控芯片制作过程中,通道尺寸难以调节以及纳米通道难以与带有微通道的PDMS(polydimethylsiloxane)键合等问题,提出一种通过胶厚调节尺寸和在纳米沟槽表面沉积氮化硅作为键合层的方案。通过纳米压印光刻进行纳米沟槽的制作,并通过控制压印胶的厚度实现了对纳米沟槽高度的调节;在纳米沟槽表面沉积氮化硅作为键合层,使用氧等离子体对PDMS表面进行改性,实现PDMS与纳米沟槽的键合。采用这种工艺制作了纳米通道尺寸小于100 nm的微纳流控芯片,并对芯片进行了荧光离子富集试验,结果显示该芯片具有较好的富集能力。Micro-nano fluidic chips have important application value in the fields of biology and medicine.In order to solve the problem that the channel size is difficult to adjust and the nano channel is difficult to bond with PDMS with microchannel in the process of nano imprinting technology,a scheme of adjusting the size of nano channel and depositing silicon nitride as bonding layer on the surface of nano groove was proposed.The nano groove was fabricated by nano imprint lithography,and the height of nano groove was adjusted by controlling the thickness of nano groove;silicon nitride was deposited on the surface of nano groove as bonding layer,and the surface of PDMS was modified by oxygen plasma to realize the bonding between PDMS and nano groove.The microfluidic chip with the size of nano channel less than 100 nm was fabricated by this process,and the fluorescence ion enrichment experiment was carried out on the chip.The results show that the chip has good enrichment ability.

关 键 词：纳米压印 纳米通道 微纳流控 表面改性 

分 类 号：TN492[电子电信—微电子学与固体电子学]