预电离效应对ArF准分子激光特性的影响分析  

Effects of Pre-ionization on Properties of ArF Excimer Laser

作　　者：苏丹 赵江山 王倩[1,2,3] SU Dan;ZHAO Jiangshan;WANG Qian(Institute of Microelectronics of The Chinese Academy of Sciences,Beijing 100094,CHN;Beijing Excimer Laser Technology and Engineering Center,Beijing 100094,CHN;University of Chinese Academy of Sciences,Beijing 100049,CHN)

机构地区：[1]中国科学院微电子研究所,北京100094 [2]北京市准分子激光工程技术研究中心,北京100094 [3]中国科学院大学,北京100049

出　　处：《半导体光电》2020年第4期517-522,共6页Semiconductor Optoelectronics

基　　金：国家科技重大专项项目(2013ZX02202)。

摘　　要：利用流体模型对ArF准分子激光气体放电过程进行了数值模拟,通过对比不同初始预电离强度下的气体放电情况,分析了预电离效应对准分子激光系统放电特性的影响,并探究了不同气体参数下的预电离效果。结果表明,初始预电离强度对于极间击穿电压、ArF准分子的形成以及光输出特性均有显著影响。在保证均匀电场且有效放电的情况下,低的初始预电离强度难以"点燃"气体,但可以获得较高的激光输出能量,而提高初始预电离强度能有效降低击穿电压,却不利于气体对能量的吸收转化。此外,预电离效果受工作气压与F2比例的影响,气压的升高或F2浓度的增加,均会降低预电离的有效性。A fluid model is used to investigate the discharge kinetics of ArF excimer laser.By comparing the gas discharge at different initial preionization intensities,the effects of preionization on discharge excited excimer laser system are analyzed.The preionization effect under different gas parameters is also discussed.The results show that the initial preionization intensity has significant effects on the breakdown voltage,the formation of ArF excimer,the optical quality and gain.Under the premise of uniform electric field and effective discharge,it is difficult to reach the gas breakdown threshold with low initial preionization intensity,but higher laser power can be obtained.Increasing the initial preionization intensity can effectively reduce the breakdown voltage,but it’s not conducive to the absorption and conversion of energy.The preionization capability is affected by the gas pressure and fluorine ratio.The increasing of gas pressure or fluorine concentration can reduce the effectiveness of preionization.

关 键 词：准分子激光 气体放电 流体模型 预电离 击穿电压 

分 类 号：TN248.2[电子电信—物理电子学]