16线集成窄脉冲半导体激光器模块的研制  

Development of a 16-Line Integrated Narrow Pulse Semiconductor Laser Module

作　　者：张厚博 王晓燕[1] 崔璐 李晓红 杨红伟[1] Zhang Houbo;Wang Xiaoyan;Cui Lu;Li Xiaohong;Yang Hongwei(The 13th Research Institute,CETC,Shijiazhuang 050051,China)

机构地区：[1]中国电子科技集团公司第十三研究所,石家庄050051

出　　处：《半导体技术》2020年第9期696-700,共5页Semiconductor Technology

摘　　要：为提高激光雷达系统的探测距离和空间探测精度,并减少其体积及成本,研制了一款16线集成窄脉冲半导体激光器模块,该模块主要包括高密度排列的激光器芯片、集成驱动电路及光电混合集成封装结构。采用三层发光纳米堆叠激光器芯片及高精度贴片工艺实现16线激光器贴装;采用结电容和开关损耗较小的新型GaN功率器件实现窄脉冲驱动电路;将激光器芯片与电路封装在同一管壳内,减小分布电感;采用能量压缩技术实现了16线单独可控,获得了高功率(70 W)、窄脉冲(6 ns)和低功耗(4 W)的优良性能。与传统采用分立式器件的激光雷达系统相比,该模块能够将系统探测距离和空间探测精度均提高将近50%。In order to improve the detection distance and space detection accuracy of a lidar system and reduce its volume and cost,a 16-line integrated narrow pulse semiconductor laser module including high density array of laser chips,integrated driving circuit and optical-electric hybrid integrated packaging structure was developed.The three-layer light-emitting nano stacked laser chip and high-precision patch technology were adopted to realize the assembly of the 16-line laser.A new type of GaN power device was adopted in the narrow pulse drive circuit due to its smaller junction capacitance and smaller switching loss.The laser chip and the circuit were encapsulated in the same shell to reduce the distributed inductance.By using the energy compression technology,the laser module is 16-line individually controllable and achieves excellent performances of high power(70 W),narrow pulse(6 ns)and low power consumption(4 W).Compared with the conventional lidar system which uses discrete devices,the detection distance and space detection accuracy of the lidar system used the module are improved by nearly 50%.

关 键 词：半导体激光器 集成封装 GaN功率器件 16线集成 窄脉冲 激光雷达 

分 类 号：TN248.4[电子电信—物理电子学]