基于纳米测量机的微结构三维坐标测量  

Three-dimensional coordinate measurement of microstructures based on nano measuring machine

作　　者：吴俊杰[1] 李源[1] WU Jun-jie;LI Yuan(Division of Mechanics and Manufacture Measurement Technology, Shanghai Institute of Measurement and Testing Technology, Shanghai 201203, China)

机构地区：[1]上海市计量测试技术研究院机械与制造计量技术研究所,上海201203

出　　处：《光学精密工程》2020年第10期2252-2259,共8页Optics and Precision Engineering

基　　金：上海市市场监督管理局科技项目资助(No.2019-02);上海市青年科技英才扬帆计划资助项目(No.19YF1441700);国家重点研发计划资助项目(No.2019YFB2004904)。

摘　　要：针对当前微纳米测量中存在的微结构跨尺度、高精度测量及高深宽比结构多参数表征问题,基于纳米测量机和微接触测头构建了纳米坐标测量系统。通过对测头与定位平台机械、电气及软件接口的设计,实现测头与平台的集成,并利用标准球对测量系统进行校准。为保证测量结果的可溯源性,对定位平台三轴激光干涉仪的激光器进行了拍频。最后,利用搭建的测量系统对高度10μm,2 mm的超高台阶及硅臂卡爪的侧壁倾角进行了测量,表明系统具备大尺寸结构的高精度测量和复杂MEMS器件特征尺寸的精确表征能力。To realize the trans-scale and high-precision measurement of microstructures,as well as to perform multiple geometrical parameter characterizations of some high-aspect-ratio structures,a nano coordinate measurement system was developed based on a nano measurement machine and a micro tactile probe.The mechanical,electrical,and software interfaces between the probe and positioning platform were designed.After the integration of the probe and positioning platform,the measurement system was calibrated using a standard micro ball.To ensure traceability of the measurement results,the laser sources of three interferometers in the positioning platform were also calibrated using the laser beat frequency.Finally,ultra-high steps with heights of 10μm and 2 mm and the sidewall angle of a silicon arm were measured using the developed system.The experiments indicated that the system can accurately measure large-size structures and complex MEMS devices.

关 键 词：微纳米测量 纳米测量机 三维微接触测头 高深宽比 侧壁倾角 

分 类 号：TH711[机械工程—测试计量技术及仪器]