新型高g值压阻式加速度计设计  

Design of New Piezoresistive Accelerometer with High g Value

作　　者：许高斌[1] 花翔 杜林云 马渊明[1] 陈兴[1] XU Gao-bin;HUA Xiang;DU Lin-yun;MA Yuan-ming;CHEN Xing(Micro Electromechanical System Research Center of Engineering and Technology of Anhui Province,School of Electronic Science&Applied Physics,Hefei University of Technology,Hefei 230009,China)

机构地区：[1]合肥工业大学电子科学与应用物理学院,安徽省微电子机械系统工程技术研究中心,安徽合肥230009

出　　处：《仪表技术与传感器》2020年第10期42-46,83,共6页Instrument Technique and Sensor

基　　金：装备预研/教育部联合基金(6141A02022422);安徽省重点研发计划资助项目(1804a09020018)。

摘　　要：提出了一种新型压阻式加速度计结构,采用微杠杆放大质量块的等效惯性力,将微杠杆结构输出端作为压敏电阻梁,采用双边对称结构设置4根差分压敏电阻梁,构成惠斯登电桥进行测量,提升灵敏度。通过有限元ANSYS与COMSOL仿真软件对结构参数进行设计与优化。该加速度计量程为2000 g,具有高谐振频率294 kHz,采用微杠杆结构将应力放大2倍,交叉轴干扰较低,其应力分别为敏感轴的3.8%和4.6%,以及10倍于量程的抗过载能力。最后设计一套基于标准微机电系统(MEMS)的加工工艺流程,基于SOI技术,利用等离子体硅深加工工艺制作压阻式加速度计,并与玻璃衬底阳极键合,提高加速度计可靠性。A new piezoresistive accelerometer structure was proposed.The micro-lever structure was used to amplify the equivalent inertial force of the mass.The output end of the micro-lever structure was used as a varistor beam.Four differential varistor beams were arranged in a bilaterally symmetric structure and that formed the Wheatstone bridge to measure and then improved the sensitivity.The structural parameters were designed and optimized by finite element ANSYS and COMSOL simulation software.The acceleration measurement range was 2000 g,with a high resonance frequency of 294 kHz.The micro-lever structure was used to amplify the stress by a factor of two,and the cross-axis interference was low.The stress was 3.8% and 4.6% of the sensitive axis,respectively,and the overload resistance was 10 times of the range.Finally,a standard micro-electromechanical system(MEMS)based processing flow was designed.Based on SOI technology,a piezoresistive accelerometer was fabricated by plasma silicon deep processing,and bonded to the glass substrate to improve the reliability of the accelerometer.

关 键 词：压阻式 加速度计 微杠杆 惠斯登电桥 MEMS 抗过载 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]