多失效机理下基于FIDES的MEMS失效率预计研究  

Research on Failure Rate Prediction of MEMS Based on FIDES with Multiple Failure Mechanisms

作　　者：高成[1] 陈炳印 黄姣英[1] 张改丽[2] GAO Cheng;CHEN Bingyin;HUANG Jiaoying;ZHANG Gaili(School of Reliability and System Engineering,Beihang University,Beijing 100191,P.R.China;North Vehicle Research Institute,Beijing 100072,P.R.China)

机构地区：[1]北京航空航天大学可靠性与系统工程学院,北京100191 [2]中国北方车辆研究所,北京100072

出　　处：《微电子学》2020年第5期743-749,共7页Microelectronics

基　　金：装备预研项目资助(41402040301);军用电子元器件科研项目(1807WK0002)。

摘　　要：针对MEMS在工艺和结构上的新特点以及当前国内外尚未形成与MEMS相关的失效率预计模型的研究现状,基于失效物理方法和现有FIDES标准,提出了一种MEMS失效率预计方法。在MEMS工艺影响分析基础上,结合实验数据和失效物理方法,提出了MEMS在多失效机理下的总体失效分布函数计算方法;之后,基于FIDES基本失效率预计模型,提出了MEMS的失效率预计模型及其适用的参数取值方法;最后,完成了某型MEMS高g值微加速度计的失效率预计案例。结果表明,预计模型充分考虑了MEMS在工艺和结构上的新特点以及多失效机理的共同作用,可有效解决现有标准手册不能准确反映制造工艺发展现状和手册中失效数据不适用的问题。Aiming at the new characteristics of MEMS in process and structure,a MEMS reliability prediction method based on the failure physics method and the FIDES was proposed.Based on the analysis of the process influence of MEMS,combined with the experimental data and the failure physics method,the overall failure distribution function calculation method of MEMS under multiple failure mechanism was proposed.Then,based on the FIDES basic failure rate prediction model,the reliability prediction model of MEMS was proposed.Finally,the reliability prediction case of a type of MEMS high g micro-accelerometer was completed.The new characteristics of MEMS and the multi-failure mechanism to MEMS were considered in the method.It could effectively solve the problem that the existing standard manual cannot accurately reflect the development status of the manufacturing process and the failure data in the manual was not applicable.

关 键 词：MEMS 可靠性预计 失效物理 FIDES 

分 类 号：TN406[电子电信—微电子学与固体电子学]