溅射参数对合金表面硬质膜层性能影响的研究现状  

Research Status of Influence of Sputtering Parameters on Properties of Hard Coatings on Alloy Surface

作　　者：付恩天 彭建洪[1] 李海宾 FU Entian;PENG Jianhong;LI Haibin(College of Physics and Electronic Information Engineering,Qinghai Nationalities University,Xining 810007,China)

机构地区：[1]青海民族大学物理与电子信息工程学院,青海西宁810007

出　　处：《热加工工艺》2020年第20期15-18,共4页Hot Working Technology

摘　　要：为了增强合金表面的耐磨性和耐蚀性,提高合金的使用寿命,磁控溅射硬质膜层近年来受到广泛的研究。介绍了磁控溅射技术的原理及特点,综述了磁控溅射技术制备硬质膜层的研究进展。结合近年来的实验研究,综述了溅射参数对硬质膜层性能的影响研究。对磁控溅射技术制备硬质膜层的发展进行了展望。In order to enhance the wear resistance and corrosion resistance of the alloy surface and improve the service life of the alloy, the magnetron sputtering hard film layer was extensively studied in recent years. The principle and characteristics of magnetron sputtering technology were briefly introduced, and the research progress of hard coatings prepared by magnetron sputtering technology were summarized. Based on the recent experimental research, the influence of sputtering parameters on the properties of hard coatings was reviewed.The development of the hard film layer prepared by magnetron sputtering technology was prospected.

关 键 词：磁控溅射 溅射参数 合金 硬质膜层 耐磨性 耐蚀性 

分 类 号：TG17[金属学及工艺—金属表面处理]