大负载高精度光栅拼接柔顺并联机构的设计方法  

Structure Design Method of Complaint Parallel Mechanism for Grating Tiling with Heavy Load Capacity and High Precision

作　　者：吴石磊 邵忠喜[1] 苏海军 富宏亚[1] WU Shilei;SHAO Zhongxi;SU Haijun;FU Hongya(School of Mechatronics Engineering,Harbin Institute of Technology,Harbin 150001;Department of Mechanical and Aerospace Engineering,The Ohio State University,Columbus 43210,United States)

机构地区：[1]哈尔滨工业大学机电工程学院,哈尔滨150001 [2]美国俄亥俄州立大学机械与航空航天工程系,哥伦布43210

出　　处：《机械工程学报》2020年第19期113-121,共9页Journal of Mechanical Engineering

基　　金：国家自然科学基金资助项目(51475114)。

摘　　要：由于加工工艺的限制,通常采用多块小口径光栅机械式拼接的方法来制备大尺寸光栅。为保证打靶成功,要求光栅拼接机构可以实现纳米级的运动精度。基于压电陶瓷驱动的柔顺并联机构可以达到纳米级的运动精度,但是柔性关节的引入降低了机构的承载能力。为解决柔顺并联机构中存在的"大负载"与"高精度"之间的矛盾,引入驱动与承载单元解耦的思想,基于约束设计法提出一种满足大口径光栅拼接机构大行程、大负载、高精度要求的新型光栅拼接柔顺并联机构,该机构具有刚柔混合、串并混联、三面正交、单点支撑、存在一条恰约束被动支链的特点。为实现光栅拼接机构的高精度运动,对设计的新型光栅拼接机构进行运动学分析,并搭建试验系统测试拼接机构的运动精度。试验结果表明利用所提设计方法设计的光栅拼接柔顺并联机构能满足拼接机构的任务要求。Due to the limitation of the processing technology,the large-aperture grating is usually tiled by using mechanical tiling technique with small segments.In order to guarantee the success of target shooting,the grating tiling mechanism is required to achieve nano-scale motion accuracy.The compliant parallel mechanism actuated by piezoelectric can achieve nano-scale motion accuracy,however,flexible joints reduce the bearing capacity of the mechanism.To solve the contradiction between"heavy load"and"high precision"in the compliant parallel mechanism.A class grating compliant parallel mechanism with large stroke,heavy load capacity,high precision is proposed based on constraint-based method by decoupling driving and moving units.And,it has the characteristics of rigid-flexible hybrid,series-parallel hybrid,three orthogonal planes,single point supporting,and precisely constrained passive chain.To realize high precision motion,the kinematics analysis of the grating tiling mechanism was carried out.Finally,a series of experiments are carried out to test the motion accuracy.The experimental results show that the compliant parallel mechanism can meet the requirements of grating tiling tasks.

关 键 词：光栅拼接 柔顺并联机构 大负载 运动学分析 

分 类 号：TH12[机械工程—机械设计及理论]