大口径光学非球面镜先进制造技术概述  

Overview of advanced manufacturing technology of large-aperture aspheric mirror

作　　者：刘锋伟[1,2] 吴永前[1,2] 陈强[1,2] 刘海涛[1,2] 闫锋涛[1,2] 张仕杨 万勇建[1,2] 伍凡[2] Liu Fengwei;Wu Yongqian;Chen Qiang;Liu Haitao;Yan Fengtao;Zhang Shiyang;Wan Yongjian;Wu Fan(Advanced Manufacturing Center of Optics,Institute of Optics and Electronics,Chinese Academy of Science,Chengdu,Sichuan 610209,China;Institute of Optics and Electronics,Chinese Academy of Science,Chengdu,Sichuan 610209,China;University of Chinese Academy of Science,Beijing 100049,China)

机构地区：[1]中国科学院光电技术研究所先进光学研制中心,四川成都610209 [2]中国科学院光电技术研究所,四川成都610209 [3]中国科学院大学,北京100049

出　　处：《光电工程》2020年第10期63-85,共23页Opto-Electronic Engineering

基　　金：国家自然科学基金资助项目(61905255)。

摘　　要：在光学系统中使用非球面可以有效校正像差,改善像质,进而简化系统结构;并且增大系统口径可以从根本上提高系统的分辨本领,因此在基础科学研究、天文学宇宙探测以及国防安全等领域都对大口径非球面镜有着迫切需求。大口径非球面的制造在现代光学制造工程中扮演着重要的角色。本文以大口径非球面镜的先进制造为主题,对大口径非球面镜的光学加工技术,特别是研磨抛光技术及其过程中所采用的面形检测方法进行了综述,特别总结了新一代先进光学制造的技术特征,展望了未来大口径非球面镜的制造策略。The aspheric surface can correct the system aberration and improve the image quality in the optical imaging system,in addition to that it can simplify the system structure significantly;On the other hand,the resolution of imaging system can be increased by improving the system aperture.Therefore,in the domain of basic scientific research,astronomical cosmological exploration and military defense security the large-aperture aspheric mirrors are all highly required.The manufacturing of large-aperture aspheric mirrors plays a critical role in modern optical engineering.This paper focuses on the advanced manufacturing techniques of large-aperture aspheric mirrors.The optical manufacturing technologies,especially the grinding and polishing techniques of large-aperture aspheric mirrors in the past half century and the surface shape testing methods during the grinding and polishing process,are reviewed.In particular,it summarizes the technical characteristics of advanced(new generation)optical manufacturing,and looks forward to the future manufacturing strategy of large-diameter aspheric mirrors.

关 键 词：大口径非球面 光学加工 光学测试 

分 类 号：O435[机械工程—光学工程] TH74[理学—光学]