基于微动刀架的超精密机床加工误差在位补偿技术  

In⁃situ compensation technology for machining error of ultra⁃precision machine based on micro⁃feed tool post

作　　者：米良[1,2] 杨川贵 刘兴宝[1,2,3] 夏仰球 唐强[1,2] MI Liang;YANG Chuan-gui;LIU Xing-bao;XIA Yang-qiu;TANG Qiang(Institute of Machinery Manufacturing Technology,China Academy of Engineering Physics,Mianyang 621900,China;National Machine Tool Production Quality Supervision Testing Center(Sichuan),Chengdu 610200,China;Institute of Launch Dynamics,Nanjing University of Science and Technology,Nanjing 210094,China)

机构地区：[1]中国工程物理研究院机械制造工艺研究所,四川绵阳621900 [2]国家机床产品质量监督检验中心(四川),成都610200 [3]南京理工大学发射动力学研究所,南京210094

出　　处：《吉林大学学报（工学版）》2020年第6期2019-2027,共9页Journal of Jilin University:Engineering and Technology Edition

基　　金：国防科工局技术基础科研项目(J0067-1922-FJC);国防科工局科学挑战专题项目(TZ2018006-0104).

摘　　要：针对超精密机床亚微米级几何误差检测和补偿需求,研制了一套超精密机床加工误差补偿系统。首先,提出了基于双测头误差分离法的以工件为基准的机床运动直线度在位检测方法,实现了测量基准自身误差与线性轴运动直线度误差的有效分离;随后,通过进行刀架系统动力学建模、柔性铰链力学建模、参数灵敏度分析以及优化,研制了一套基于压电陶瓷和柔性铰链导向的微动刀架,为误差补偿提供硬件基础;最后,在某超精密加工机床上利用分离所得机床线性轴直线度偏差和微动刀架实现了加工误差补偿能力的验证。试验结果表明:本文提出的补偿技术具备亚微米级补偿能力,可为超精密加工机床在位误差检测和补偿提供有益的探索。For satisfying the requirement of measurement and compensation for sub-micro geometricalerror of ultra-precision machine,a compensation system for ultra-precision machine is developed. First,based on the double-probe error separation method,an in-situ measurement method,by is proposed by taking a work-piece as the measurement basis,which can effectively separate the straightness error of the motion axis from the work-piece’s self error. Then,by dynamic modeling of this scheme,mechanical modeling of the flexible hinge,sensitivity analysis and optimization of their parameters,a micro-feed tool post,which consists of piezoelectric ceramic and flexible hinge,is developed. This will provide the support for the errors compensation. The ability of processing error compensation of the developed system is verified using the straightness deviation of linear axis measured by the in-situ measurement system and the micro tool holder. Experimental results show that the compensation technology proposed in this paper has sub-micron compensation capability,which can provide useful exploration for in-situ measurement and compensation of machining error of ultra-precision machine tools.

关 键 词：超精密加工机床 超精密加工 误差补偿 误差检测 柔性铰链 

分 类 号：TG519.3[机械工程—精密仪器及机械]