机器人气囊抛光SiC光学元件加工特性研究  

SiC Optical Element Processing Properties Under Robot Bonnet Polishing

作　　者：黄智 周涛 吴湘 刘海涛[2] 万勇健[2] 郑晓 HUANG Zhi;ZHOU Tao;WU Xiang;LIU Haitao;WAN Yongjian;ZHENG Xiao(School of Mechanical and Electrical Engineering,University of Electronic Science and Technology of China,Chengdu 611731,China;Institute of Optics and Electronics,Chinese Academy of Sciences,Chengdu 610209,China)

机构地区：[1]电子科技大学机械与电气工程学院,成都611731 [2]中国科学院光电技术研究所,成都610209

出　　处：《西安交通大学学报》2020年第12期22-29,共8页Journal of Xi'an Jiaotong University

基　　金：国家重点研发计划资助项目(2016YFB0500400);四川省科技计划资助项目(2020YFG0407)。

摘　　要：针对碳化硅光学元件已有的化学机械抛光、磁流变抛光、电化学抛光和催化剂辅助抛光等方式存在材料去除率低、成本高等问题,提出机器人气囊抛光方法,并对气囊抛光特性、抛光头机械结构进行了研究。首先基于Preston理论和赫兹接触理论以及速度分析建立了材料理论去除模型,并对去除函数进行了仿真,再此基础上设计了气囊抛光磨头装置。然后对非球面碳化硅元件开展了单点和多点抛光,实验验证了去除函数的精确性和稳定性。最后通过粗抛和精抛进行加工应用验证,实验结果表明,所提出方法能够有效实现碳化硅光学元件抛光,并且去除函数精度高稳定性强,通过3个周期的粗抛、4个周期的精抛,面形收敛率分别为69.4%、51.9%,且收敛速度快、加工精度高。Aiming at the low material removal rate and high cost in the existing magnetorheological polishing,electrochemical polishing and catalysts-assisted polishing methods for silicon carbide optical elements,a robot bonnet polishing method is proposed,and the polishing characteristics and mechanical structure of polishing head are investigated.The theoretical material removal model is established following Preston theory,Hertz contact theory and velocity analysis,the removal function is simulated,and the bonnet polishing grinding head device is designed.Then single-point and multi-point polishing experiments are carried out to verify the accuracy and stability of the removal function.The processing applications are examined by rough and fine finishing.The experimental results show that the proposed method can effectively achieve silicon carbide optical element polishing,and the removal function has high precision and stability.Via 3 cycles of rough polishing and 4 cycles of fine polishing,the convergence rate of surface profile achieves 69.4%and 51.9%respectively.

关 键 词：气囊抛光 碳化硅 去除函数 抛光头 

分 类 号：TH161[机械工程—机械制造及自动化]