用于双探针原子力显微镜的定位平台的设计及实验验证  

Design and Experimental Verification of Positioning Platform for Double-probe Atomic Force Microscopy

作　　者：林之东 高思田[2] 黄鹭[2] 李琪[2] LIN Zhi-dong;GAO Si-tian;HUANG Lu;LI Qi(Collage of Mechanical Eng&Autom,Zhejiang Sci-Tech University,Hangzhou,Zhejiang 310018,China;National Institute of Metrology,Beijing 100029,China)

机构地区：[1]浙江理工大学机械与自动控制学院,浙江杭州310018 [2]中国计量科学研究院,北京100029

出　　处：《计量学报》2020年第11期1321-1326,共6页Acta Metrologica Sinica

基　　金：国家重点研发计划(2016YFF0200602)。

摘　　要：针对双探针原子力显微镜的需求,设计了一种提供精确位移的大行程定位平台。采用柔性铰链和压电陶瓷致动器分别作为定位平台的导向机构和驱动机构。在X、Y和Z轴运动方向通过并联机构实现独立位移。对定位平台进行数学建模,分析和计算定位平台的工作刚度和固有频率,并进行了有限元仿真分析。以电容传感器作为位移测量单元构建了定位平台实验装置,并进行了实验验证。实验结果表明:定位平台在X与Y轴方向上拥有110μm的行程,分辨率为5 nm,在Z轴方向上拥有45μm的行程,分辨率为5 nm。A large-stroke positioning platform that provides precise displacement is designed for the needs of dualprobe atomic force microscopy. A flexible hinge and a piezoelectric actuator are respectively used as a guiding mechanism and a driving mechanism of the positioning platform. The X,Y,and Z axis motion directions are independently displaced by a parallel mechanism. Mathematical modeling of the positioning platform is carried out,the working stiffness and natural frequency of the positioning platform are analyzed and calculated,and the finite element simulation analysis is carried out.The experimental devices of the positioning platform are constructed with the capacitive sensor as the displacement measuring unit,and the experimental verification is carried out. Experimental results show that the positioning platform has a travel distance of 110 μm in the X and Y axis directions with a resolution of 5 nm,and a travel distance of 45 μm in the Z axis direction with a resolution of 5 nm.

关 键 词：计量学 双探针 原子力显微镜 定位平台 分辨率 柔性铰链 

分 类 号：TB92[一般工业技术—计量学]