湿度传感元件制备、封装及检测电路设计的研究进展  

Research Progress of Humidity-Sensing Element Preparation,Packaging,and Detection-Circuit Design

作　　者：丁书聪 黄宜明 王晓 梁峻阁 顾晓峰 DING Shucong;HUANG Yiming;WANG Xiao;LIANG Junge;GU Xiaofeng(Engineering Research Center of Internet of Things Technology Applications,Ministry of Education,Department of Electronic Engineering,Jiangnan University,Wuxi 214122,China)

机构地区：[1]江南大学电子工程系物联网技术应用教育部工程研究中心,江苏无锡214122

出　　处：《电子与封装》2021年第1期24-32,共9页Electronics & Packaging

基　　金：国家自然科学基金青年项目(61903160);江苏省自然科学基金青年项目(BK20190581);中国博士后科学基金第67批面上资助(2020M6171439)

摘　　要：湿度传感器是一种用于感知环境湿度参数的器件,在气象探测、农业种植、工业制造、馆藏存储等领域应用广泛。湿度传感器的检测特性主要由湿敏材料、检测电极、封装及检测电路共同决定,其中湿敏材料的材料特性和结构特征对传感性能的影响最为显著,也是该领域的研究热点。讨论了湿度传感元件的感湿机理和湿敏材料的分类,介绍了湿度传感器的检测参数及优化,阐述了纳米湿敏材料在湿度传感器中的应用,对常用的湿度传感器封装方案和检测电路设计进行了综述。Humidity sensor is a sensitive device that can sense environmental humidity parameters,which is widely used in meteorological detection,agricultural planting,industrial manufacturing,and collection storage,etc.Humidity-detection characteristics are mainly affected by humidity-sensitive material,detection electrode,packaging,and detection-circuit design.Among them,the material properties and structure characteristics of the humidity sensitive material are the most significant factors to affect the humidity-sensing performance,which are also the hot research topics in this field.The mechanism of humidity sensing and the materials'chemical characteristics and structure properties are firstly discussed.Then comes the introductions of humidity sensors'detecting parameters along with optimizations and statements on nanosclae humidity-sensitive materials in detecting application.The common-used packaging scheme and detection-circuit design of humidity sensor are finally reviewed.

关 键 词：湿度传感器 湿敏材料 封装 检测电路 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TN305.94[自动化与计算机技术—控制科学与工程]