纳米光刻调焦调平传感器光电探测系统设计  

Design of Photoelectric Detecting System for Focusing and Leveling Sensor in Nanoscale Lithography

作　　者：龚士彬 谢冬冬 武志鹏[1,3] 宗明成[1,2,3] GONG Shi-bin;XIE Dong-dong;WU Zhi-peng;ZONG Ming-cheng(Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China;University of Chinese Academy of Sciences,Beijing 100049,China;Key Laboratory of Microelectronics Devices&Integrated Technology,Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China)

机构地区：[1]中国科学院微电子研究所,北京100029 [2]中国科学院大学,北京100049 [3]中国科学院微电子研究所微电子器件与集成技术重点实验室,北京100029

出　　处：《仪表技术与传感器》2020年第12期6-9,15,共5页Instrument Technique and Sensor

基　　金：国家科技重大专项(2017ZX02101006-003)。

摘　　要：针对光刻机调焦调平传感器的高实时性数据采集的设计需求,设计了一种多通道同步采集的光电探测系统。该系统使用FPGA作为数据处理和逻辑控制核心,实现了21个通道测量数据的实时采集和高速传输,与硅片台位置同步以保证测量数据与被测位置间的同步性,利用高速差分串行传输和PCIe协议完成数据的高速传输,并由上位机软件保存数据。实验结果证明该系统测量精度好于4 nm,并可稳定采集调焦调平传感器的测量结果。For the requirement of high realtime data acquisition of focusing and leveling sensors in the lithography system,a multichannel synchronous photoelectric detecting system was designed.The photoelectric detecting system was based on FPGA as the core of data processing and logic control to realize the 21 realtime data acquisition channels and highspeed data transmission.The system synchronized with the wafer stage to ensure the synchronization between the measurement data and the measured position.Highspeed differential serial transmission and PCIe were used to realize the highspeed data transmission when saving data to upper computer software.Experiments show that the measurement accuracy is better than 4 nm,and the system can stably collect the measurement results of the focusing and leveling sensor.

关 键 词：光刻机 调焦调平 探测系统 同步性 实时数据采集 多通道 

分 类 号：TP274[自动化与计算机技术—检测技术与自动化装置]