开放式半导体微纳加工实验室危化品管理体系的规范化建设  

Standardized construction of hazardous chemicals management system in open semiconductor micro-nano processing laboratory

作　　者：王英[1] 程秀兰[1] 吴炜文 付学成[1] 韩永来 沈赟靓[1] 张明军 WANG Ying;CHENG Xiulan;WU Weiwen;FU Xuecheng;HAN Yonglai;SHEN Yunliang;ZHANG Mingjun(Center for Advanced Electronic Materials and Devices,Shanghai Jiaotong University,Shanghai 200240,China)

机构地区：[1]上海交通大学先进电子材料与器件校级平台,上海200240

出　　处：《实验技术与管理》2020年第12期292-294,322,共4页Experimental Technology and Management

基　　金：2018年度上海研发公共服务平台建设资助项目(18DZ2295400);上海交通大学决策咨询课题资助项目(JCZXSJB2020-011)。

摘　　要：开放式半导体微纳加工实验室具有工艺种类多、工艺复杂、工艺流程长等特点,在工艺过程中所涉及的化学品及特种气体种类多、易燃易爆试剂用量大、危险性高等,因此,对这类实验室的安全管理提出了更高的要求。根据这类实验室的特点,该文针对开放式微纳加工实验室的危化品规范化管理进行了探讨,为实验室安全运行打下了很好的基础。The semiconductor micro-nano processing has the characteristics of multi-type,complex and long process flow,so it involves a variety of chemicals and special gases in the open micro-nano processing laboratory.Due to the large amount of inflammable and explosive reagents and high risk,higher requirements for the safety management of the laboratory are put forward.According to this characteristic,this paper mainly discusses the standardized management of hazardous chemicals in the micro-nano processing laboratory,which can lay a good foundation for the safe and efficient operation of such laboratory.

关 键 词：微纳加工实验室 危化品管理 特种气体 

分 类 号：X921[环境科学与工程—安全科学] G642.0[文化科学—高等教育学]