双向压电驱动的二维快速伺服刀架  

A 2-Dimensional Fast Servo Tool Driven by Bidirectional Piezoelectric Actuator

作　　者：赖文锋 李国平[1] 武志士 娄军强[1] 杨依领 LAI Wenfeng;LI Guoping;WU Zhishi;LOU Junqiang;YANG Yiling(College of Mechanical Engineering and Mechanics, Ningbo University,Ningbo 315211,China)

机构地区：[1]宁波大学机械工程与力学学院,浙江宁波315211

出　　处：《压电与声光》2021年第1期88-93,共6页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(51805276);浙江省自然科学基金资助项目(No.LQ18E050003)。

摘　　要：快速伺服刀架能够提供精确、快速的微纳米级运动。为了获得双向和二维运动,该文研制了一种双向压电驱动的二维快速伺服刀架。该刀架采用对称结构设计,结合柔顺放大机构和位移解耦机构,末端执行机构实现较大的输出位移,同时减小耦合位移。基于伪刚体模型,建立快速伺服刀架的静力学和动力学模型,得到机构的输出位移、输出耦合比、最大应力和固有频率。通过有限元仿真验证了模型的正确性。最后,采用电火花线切割加工快速伺服刀架原型样机,并搭建了实验测试系统。实验结果表明,快速伺服刀架在x、y方向的位移放大率分别为3.56和3.57;输出耦合误差分别为1.26%和1.00%,装配压电陶瓷驱动器后系统在x、y方向的一阶固有频率均是270 Hz,系统动态性能良好。The fast servo tool can provide precise and fast micro/nanometer motion.In order to obtain bidirectional and 2-dimensional motion,a 2-dimensional fast servo tool driven by dual piezoelectric ceramic actuator is developed in this paper.The fast servo tool adopts a symmetrical structure design,combined with a compliant amplification mechanism and a displacement decoupling mechanism,the end actuator can achieve a large output displacement and reduce the coupling displacement.Based on the pseudo-rigid body model,the static and dynamic models of the fast servo tool are established,and the output displacement,output coupling ratio,maximum stress and natural frequency of the mechanism are obtained.The correctness of the model is verified by finite element simulation.Finally,a prototype of the fast servo tool is processed by wire EDM machining,and an experimental test system was built.The experimental results show that the displacement magnification of the fast servo tool in the x and y directions is 3.56 and 3.57 respectively;the output coupling error is 1.26%and 1.00%respectively.The first-order natural frequency of the system in both the x and y directions is 270 Hz after assembling the piezoelectric ceramic driver,and the system has good dynamic performance.

关 键 词：快速伺服刀架 柔顺机构 二维运动 有限元分析 压电陶瓷驱动器 

分 类 号：TN384[电子电信—物理电子学] TM22[一般工业技术—材料科学与工程]